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Stage I is the pr)Tj -0.0003 Tc 0.1223 Tw 12.899 0 Td [(o)-4(cess o)-4(f)-3( m)10(o)-4(istu)-4(re so)-4(ak)-4(in)-4(g)-4(,)-2( in)-4( )]TJ 0.0014 Tc 0.1566 Tw -12.899 -1.168 Td [(which )-6(a specific com)11(b)-2(ination be)]TJ 0.0007 Tc 0.1573 Tw 13.601 0 Td [(tween am)11(bient tem)11(p)-3(erature, )]TJ -0.0006 Tc 0.1466 Tw -13.601 -1.168 Td [(relativ)-4(e h)-4(u)-4(m)9(id)-4(ity an)-4(d)-4( so)-4(ak)-4( tim)9(e is d)-4(e)-1(fin)-4(e)-1(d)-4( to)-4( m)9(i)1(m)9(i)1(c facto)-4(r)-4(y )]TJ 0.0019 Tc 0.426 Tw 0 -1.168 TD [(environm)12(ent )-6(during storage before surface m)12(ounting, as )]TJ 0.0028 Tc -0.0008 Tw T* [(shown i)5(n)-1( Fi)5(g. 1. )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 69.7608 492.8484 Tm ( )Tj 0.002 Tc 9.701 0 0 9.7194 55.7928 360.1524 Tm ( )Tj 23.836 0 Td ( )Tj 0.0023 Tc -11.867 -1.042 Td (\(a\) )Tj 0.002 Tc -1.728 -6.419 Td ( )Tj 12.743 0 Td ( )Tj 0.0032 Tc -11.045 -1.042 Td (\(b\) )Tj 0.0015 Tc 0.3544 Tw -11.939 -1.27 Td (Fig. 1: \(a\) Moisture soak )Tj 0.001 Tc 0.3489 Tw 11.975 0 Td (in the stage I of JEDEC/IPC )Tj -0.0001 Tc 0.0201 Tw -11.975 -1.168 Td [(m)10(o)-4(istu)-4(re sen)-4(s)-1(itiv)-4(ity test, \(b)-4(\) m)10(o)-4(istu)-4(re so)-4(ak)-4( o)-4(f)-3( p)-4(l)2(astic )-6(p)-4(ack)-4(ag)-4(es )]TJ 0.0028 Tc -0.0008 Tw T* [(duri)5(ng st)5(orage and shi)5(ppi)5(ng )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 69.7608 233.8002 Tm ( )Tj -0.0002 Tc 0.2062 Tw 9.701 0 0 9.7194 69.7608 222.2766 Tm [(Stag)-4(e )-6(II )-6(is )-6(th)-4(e p)-4(r)-3(o)-4(cess o)-4(f)-3( rap)-4(i)2(d)-4( h)-4(eatin)-4(g)-4( to)-4( sim)10(u)-4(late th)-4(e )]TJ 0.0019 Tc 0.1021 Tw -1.44 -1.168 Td [(surface m)12(ounting soldering reflow )]TJ 0.002 Tc 0.108 Tw 14.519 0 Td (process, as shown in Fig. )Tj 0.0013 Tc 0.0247 Tw -14.519 -1.168 Td (2. The entire packages)Tj 0.0011 Tc 0.0249 Tw 9.101 0 Td [( with lead-free m)11(a)1(teri)]TJ 0.0014 Tc 0.0246 Tw 8.717 0 Td (als are exposed to )Tj 0.001 Tc 0.163 Tw -17.818 -1.168 Td [(an elevated tem)11(p)-3(erature envir)]TJ 0.0012 Tc 0.1628 Tw 12.365 0 Td [(onm)11(ent with peak )6(tem)11(p)-3(erature )]TJ 0.0023 Tc -0.0003 Tw -12.365 -1.168 Td [(as hi)4(gh as 260\260C or even 270\260C. )]TJ 0.0019 Tc 0.1321 Tw 1.44 -1.27 Td [(During surface m)12(ounting, ther)]TJ 0.0011 Tc 0.1389 Tw 12.551 0 Td [(m)11(a)1(l )6(stresses are developed )]TJ 0.0002 Tc 0.0738 Tw -13.991 -1.233 Td [(d)-4(u)-4(e to)-4( th)-4(erm)10(al m)10(i)2(sm)10(atch)-4(. [5)-4(-7)-4(]. )-6(Th)-4(e )-6(th)-4(erm)10(al )-6(strain)-4(, )]TJ /C2_0 1 Tf 0 Tc 0 Tw <0048>Tj /TT0 1 Tf 6.2736 0 0 6.2856 267.2916 151.0981 Tm (T)Tj 0.0006 Tc 0.0794 Tw 9.701 0 0 9.7194 271.1328 152.5531 Tm (, at the )Tj 0.0015 Tc 0.0005 Tw -22.198 -1.168 Td [(soak tem)11(p)-2(erature can be expressed as )]TJ /C2_1 1 Tf 0 Tc 0 Tw 1.44 -1.27 Td <0130>Tj /TT0 1 Tf 6.2736 0 0 6.2856 73.8348 127.4106 Tm (T)Tj 0.0007 Tc 0.0013 Tw 9.701 0 0 9.7194 77.676 128.8656 Tm ( = )Tj /C2_1 1 Tf -0.002 Tc 0 Tw 1.068 0 Td <012E01FB>Tj /TT2 1 Tf 0.0018 Tc 1.164 0 Td (T )Tj /TT0 1 Tf 0.0024 Tc -0.0004 Tw 2.712 0 Td [( )-3348( )-3348( )-3348( )-3348( \(1\) )]TJ 0.0018 Tc 0 Tw -7.199 -1.27 Td (where )Tj /C2_1 1 Tf 0 Tc 2.868 0 Td <012E>Tj /TT0 1 Tf 0.0013 Tc 0.1567 Tw 0.522 0 Td [( is the coefficient of therm)11(a)1(l expansion \(CTE\), and )]TJ /C2_1 1 Tf 0 Tc 0 Tw -3.39 -1.168 Td <01FB>Tj /TT2 1 Tf 0.642 0 Td (T)Tj /TT0 1 Tf 0.0018 Tc 0.0602 Tw 0.558 0 Td [( )6(i)4(s)1( )6(t)4(h)-2(e )6(t)4(e)2(m)12(p)-2(erat)4(ure change. Si)4(m)12(i)4(l)4(a)2(rl)4(y)4(, hy)4(groscopi)4(c st)4(resses )]TJ 0.0024 Tc 0.1076 Tw -1.2 -1.168 Td [(are devel)4(oped due t)4(o)-1( hy)5(groscopi)4(c swel)4(l)4(i)4(ng )-6(m)12(i)4(sm)12(at)4(ch )-6([8-12])5(. )]TJ 0.0022 Tc 0.1078 Tw 0 -1.233 TD [(The hy)4(groscopi)4(c swel)4(l)4(i)4(ng st)4(rai)4(n)-2(, )]TJ /C2_0 1 Tf 0 Tc 0 Tw <0048>Tj /TT0 1 Tf 6.2736 0 0 6.2856 193.7268 80.385 Tm (H)Tj 0.0013 Tc 0.1087 Tw 9.701 0 0 9.7194 198.2664 81.84 Tm [(, at the soaking hum)11(i)3(dity )]TJ 0.0022 Tc -0.0002 Tw -14.687 -1.168 Td [(condi)4(t)4(i)4(on can be expressed as )]TJ /C2_1 1 Tf 0 Tc 0 Tw 30.093 67.341 Td <0130>Tj /TT0 1 Tf 6.2736 0 0 6.2856 351.798 723.5533 Tm (H)Tj 0.0007 Tc 0.0013 Tw 9.701 0 0 9.7194 356.3376 725.0083 Tm ( = )Tj /C2_1 1 Tf 0 Tc 0 Tw 1.068 0 Td <0215>Tj /TT2 1 Tf 0.51 0 Td (C)Tj /TT0 1 Tf 0.0024 Tc -0.0004 Tw 0.666 0 Td [( )-216( )-3348( )-3348( )-3348( \(2\) )]TJ 0.0018 Tc 0 Tw -6.731 -1.27 Td (where )Tj /C2_1 1 Tf 0 Tc 2.79 0 Td <0215>Tj /TT0 1 Tf 0.0007 Tc 0.0853 Tw 0.51 0 Td [( is the coefficient )-6(of )]TJ 0.0027 Tc 0.0893 Tw 8.705 0 Td [(hy)5(groscopi)5(c swel)5(l)5(i)5(ng , and )]TJ /TT2 1 Tf 0 Tc 0 Tw 11.375 0 Td (C)Tj /TT0 1 Tf -0.0006 Tc 0.0926 Tw 0.666 0 Td ( is )Tj -0.0002 Tc 0.2841 Tw -24.045 -1.168 Td [(th)-4(e m)10(o)-4(istu)-4(re co)-4(n)-4(cen)-4(tratio)-4(n)-4(.)-2( D)-4(u)-4(rin)-4(g)-4( th)-4(e so)-4(ak)-4(, th)-4(e )6(m)10(o)-4(istu)-4(re )]TJ 0.0023 Tc 0.3776 Tw 0 -1.168 TD [(condenses )-6(i)4(n)-2( t)4(h)-2(e m)12(i)4(cropores or free vol)4(u)-2(m)12(e)2(s of porous )]TJ 0.2816 Tw T* [(m)12(a)2(t)4(e)2(ri)4(al)4(s. )-6(The m)12(o)-2(i)4(s)2(t)4(u)-2(re vapori)4(zat)4(i)4(on generat)4(e)2(s hi)4(gh vapor )]TJ 0.0024 Tc 0.4375 Tw T* [(pressure [13-17])5(. General)4(l)4(y)5(, t)4(h)-1(e dri)4(v)-1(i)4(ng forces i)4(n)-1(duci)4(ng )]TJ 0.0019 Tc 0.0601 Tw T* [(fai)4(l)4(u)-2(res are t)4(h)-2(erm)12(a)2(l)4( st)4(ress, hy)4(gro-st)4(ress )-6(and )-6(vapor )-6(pressure )-6(i)4(n)-2( )]TJ -0.0003 Tc 0.0023 Tw T* [(th)-4(e m)10(o)-4(istu)-4(re sen)-4(s)-1(itiv)-4(ity lev)-4(el test, w)-4(h)-4(ich)-4( can)-4( b)-4(e d)-4(escrib)-4(ed)-4( as )]TJ 0 Tc 0 Tw 0 -1.27 TD ( )Tj /C2_1 1 Tf 0.252 0 Td <0131>Tj /TT0 1 Tf 0.0007 Tc 0.0013 Tw 0.54 0 Td ( = )Tj /C2_1 1 Tf 0 Tc 0 Tw 1.068 0 Td <0131>Tj /TT0 1 Tf 6.2736 0 0 6.2856 336.084 630.7824 Tm (T)Tj 0.0007 Tc 0.0013 Tw 9.701 0 0 9.7194 339.9252 632.2374 Tm ( + )Tj /C2_1 1 Tf 0 Tc 0 Tw 1.068 0 Td <0131>Tj /TT0 1 Tf 6.2736 0 0 6.2856 355.5228 630.7824 Tm (H)Tj 0.002 Tc 9.701 0 0 9.7194 360.0624 632.2374 Tm ( + P \ \(3\) )Tj 0.0018 Tc -4.871 -1.27 Td (where )Tj /C2_1 1 Tf 0 Tc 2.706 0 Td <0131>Tj /TT0 1 Tf 0.002 Tw 0.54 0 Td [( is to)-4(tal d)-4(r)-3(iv)-4(in)-4(g)-4( fo)-4(rces in)-4(d)-4(u)-4(cin)-4(g)-4( )-6(failu)-4(res, )-6(p)-4( )-6(is )-6(th)-4(e )-6(v)-4(ap)-4(o)-4(r )]TJ 0.002 Tc 0 Tw -3.246 -1.168 Td (pressure. )Tj 0 Tc 5.8088 0 0 5.82 326.772 599.8783 Tm ( )Tj 0.002 Tc 9.701 0 0 9.7194 312.804 468.6372 Tm ( )Tj 23.866 0 Td ( )Tj 0.0023 Tc -11.897 -1.042 Td (\(a\) )Tj 0 Tc 13.163 -5.778 Td ( )Tj 0.0032 Tc -13.193 -1.042 Td (\(b\) )Tj 0.0019 Tc 0.33 Tw -11.939 -1.27 Td [(Fi)4(g. 2:)4( \(a\) Rapi)4(d heat)4(i)4(n)-2(g i)4(n)-2( t)4(h)-2(e st)4(age II )6(of )6(JEDEC/)4(IPC )]TJ 0.0004 Tc 0.4455 Tw 0 -1.168 TD [(m)10(o)-3(isture sensitivity test, \(b)]TJ 0.002 Tc 0.4379 Tw 12.173 0 Td [(\) surface m)12(ounting soldering )]TJ 0.0018 Tc 0.0002 Tw -12.173 -1.168 Td (reflow process )Tj 0 Tc 0 Tw 5.8088 0 0 5.82 312.804 348.5124 Tm ( )Tj 0.0017 Tc 0.6362 Tw 9.701 0 0 9.7194 326.772 336.9888 Tm [(The existing m)12(e)2(thodology )6(fo)]TJ 0.0007 Tc 0.6312 Tw [(r accelerated m)11(o)-3(isture )]TJ -0.0009 Tc 0.2069 Tw -1.439 -1.168 Td [(sen)-5(s)-2(itiv)-5(ity )-6(test )-6(w)-5(a)-1(s )-6(d)-5(e)-1(v)-5(e)-1(lo)-5(p)-5(e)-1(d)-5( )-6(b)-5(a)-1(sed)-5( o)-5(n)-5( th)-5(e eq)-5(u)-5(i)1(v)-5(a)-1(len)-5(c)-1(y o)-5(f)-4( )]TJ 0.001 Tc 0.235 Tw T* [(local m)11(o)-3(isture concentration at)]TJ 0.0004 Tc 0.2355 Tw 13.079 0 Td ( the critical interface. Local )Tj -0.0001 Tc 0.1941 Tw -13.079 -1.168 Td [(m)10(o)-4(istu)-4(re )-6(co)-4(n)-4(cen)-4(tratio)-4(n)-4( )-6(d)-4(eterm)10(in)-4(es lo)-4(cal v)-4(ap)-4(o)-4(r)-3( p)-4(r)-3(essu)-4(re an)-4(d)-4( )]TJ 0.0013 Tc 0.4986 Tw T* (interfacial adhesion. The equi)Tj -0.0009 Tc 0.5008 Tw 13.415 0 Td [(v)-5(a)-1(len)-5(c)-1(y o)-5(f)-4( lo)-5(cal )6(m)9(o)-5(istu)-5(re )]TJ 0.0015 Tc 0.3844 Tw -13.415 -1.168 Td (concentration can ensure the )Tj 0.0024 Tc 0.3775 Tw 13.241 0 Td [(equi)4(val)4(e)2(ncy)5( )-6(of l)4(o)-1(cal)4( vapor )]TJ 0.0014 Tc 0.1146 Tw -13.241 -1.168 Td [(pressure and interfacial )-6(adhesi)]TJ -0.0002 Tc 0.1222 Tw 12.521 0 Td [(o)-4(n)-4( th)-4(eo)-4(retically. H)-4(o)-4(w)-4(ev)-4(er, th)-4(e )]TJ -0.0007 Tc 0.0987 Tw -12.521 -1.168 Td [(eq)-5(u)-5(i)1(v)-5(a)-1(len)-5(c)-1(y )6(o)-5(f)-4( lo)-5(cal m)9(o)-5(istu)-5(re co)-5(n)-5(cen)-5(tratio)-5(n)-5( is n)-5(o)-5(t en)-5(o)-5(u)-5(g)-5(h)-5( to)-5( )]TJ 0.0021 Tc 0.2698 Tw T* [(ensure t)4(h)-2(e equi)4(val)4(e)2(ncy)4( of l)4(o)-2(cal)4( t)4(h)-2(erm)12(a)2(l)4( st)4(ress and hy)4(gro-)]TJ 0.0007 Tc 0.1753 Tw T* [(stress, because the local )6(ther)]TJ 0.0012 Tc 0.1688 Tw 12.077 0 Td [(m)11(a)1(l stress and hygro-stress are )]TJ 0.0007 Tc 0.0433 Tw -12.077 -1.168 Td [(affected by the overall tem)11(p)-3(erat)]TJ 0.0026 Tc 0.0474 Tw 12.905 0 Td [(ure and m)13(o)-1(i)5(s)2(t)5(u)-1(re di)5(st)5(ri)5(but)5(i)5(ons )]TJ 0.0012 Tc 0.2767 Tw -12.905 -1.168 Td (of the whole electronic package.)Tj 0.0017 Tc 0.2762 Tw 14.117 0 Td [( Therefore, to )6(ensure )6(the )]TJ 0.0024 Tc 0.1196 Tw -14.117 -1.168 Td [(equi)4(val)4(e)2(ncy)5( of al)4(l)4( dri)4(v)-1(i)4(ng forces )-6(\(i)4(.e., )-6(t)4(h)-1(erm)12(a)2(l)4( )-6(st)4(ress, )-6(hy)5(gro-)]TJ 0.0021 Tc 0.5998 Tw T* [(st)4(ress )-6(and )-6(vapor )-6(pressure\) bet)4(w)-2(een t)4(h)-2(e st)4(andard and )]TJ 0.0001 Tc 0.0919 Tw T* [(accelerated m)10(o)-4(isture sensitivity le)]TJ 0.0004 Tc 0.0916 Tw 13.853 0 Td [(vel tests, not only the )-6(local )]TJ 0.001 Tc 0.223 Tw -13.853 -1.168 Td [(m)11(o)-3(isture concentration at )6(the )]TJ 0.0004 Tc 0.2175 Tw 12.785 0 Td (critical interface but also the )Tj 0.0023 Tc 0.1797 Tw -12.785 -1.168 Td [(overal)4(l)4( t)4(e)2(m)12(p)-2(erat)4(ure and m)12(o)-2(i)4(s)2(t)4(u)-2(re di)4(st)4(ri)4(but)4(i)4(ons of )6(t)4(h)-2(e )6(whol)4(e )]TJ 0.002 Tc 0.4559 Tw T* [(el)4(ect)4(roni)4(c package shoul)4(d be equi)4(val)4(e)2(nt)4( t)4(o)-2( achi)4(e)2(ve )6(t)4(h)-2(e )]TJ 0.0022 Tc -0.0002 Tw T* [(equi)4(val)4(e)2(ncy)4( of fai)4(l)4(u)-2(re m)12(o)-2(de and fai)4(l)4(u)-2(re rat)4(e)2(. )]TJ 0.0024 Tc 0.4795 Tw 1.44 -1.27 Td [(Thi)4(s)2( paper i)4(n)-1(t)4(r)-1(oduces a new m)12(e)2(t)4(hodol)4(ogy)5( t)4(h)-1(at)4( can )]TJ 0.0004 Tc 0.0316 Tw -1.44 -1.168 Td [(accelerate the IPC/JEDEC m)10(o)-3(isture )]TJ 0.0002 Tc 0.0318 Tw [(sensitivity level test )-6(of )-6(an )]TJ 0.0023 Tc 0.4916 Tw T* [(ul)4(t)4(r)-1(a-t)4(h)-2(i)4(n)-2( st)4(acked-di)4(e)2( CSP. The )6(m)12(e)2(t)4(hodol)4(ogy)4( )6(i)4(s)2( )6(m)12(a)2(i)4(n)-2(l)4(y)4( )]TJ 0.0026 Tc 0.1854 Tw T* [(devel)5(oped based on t)5(h)-1(e equi)5(va)]TJ -0.0009 Tc 0.1889 Tw 13.073 0 Td [(len)-5(c)-1(y o)-5(f)-4( b)-5(o)-5(t)1(h)-5( lo)-5(cal )6(m)9(o)-5(istu)-5(re )]TJ -0.0004 Tc 0.0744 Tw -13.073 -1.168 Td [(co)-4(n)-4(cen)-4(tratio)-4(n)-4( )6(an)-4(d)-4( )6(th)-4(e o)-4(v)-4(erall m)10(o)-4(istu)-4(re d)-4(i)2(strib)-4(u)-4(tio)-4(n)-4(.)-2( Th)-4(e lo)-4(cal )]TJ 0.0024 Tc 0.0356 Tw T* [(m)12(o)-1(i)4(s)2(t)4(u)-2(re concent)4(r)-1(at)4(i)4(on equi)4(val)4(e)]TJ 0.0028 Tc 0.0352 Tw 12.929 0 Td [(ncy)5( woul)5(d be est)5(a)3(bl)5(i)5(s)2(hed fi)5(rst)5( )]TJ ET q 84.5063934 0 0 56.9777985 194.2505646 287.6934204 cm /Im0 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 68.94 284.22 81.72 61.02 re W n q 83.02874 0 0 62.6399245 68.0941167 283.1396728 cm /Im1 Do Q Q q 0.9700012 0 0 0.9700012 9 12 cm 71.34 493.26 215.1 -134.22 re W* n q 215.2197106 0 0 134.3398144 71.2798962 358.9795658 cm /Im2 Do Q Q BT /TT3 1 Tf 0 Tc 0 Tw 17.4268 0 0 17.46 189.4782 470.5579 Tm ( )Tj ET q 0.9700012 0 0 0.9700012 180.8065948 484.2935638 cm 1 0.203 0.004 rg 0 0 m 0 -2.22 l 0 -2.46 -0.18 -2.64 -0.36 -2.64 c -0.6 -2.64 -0.72 -2.46 -0.72 -2.22 c -0.72 0 l -0.72 0.18 -0.6 0.36 -0.36 0.36 c -0.18 0.36 0 0.18 0 0 c h 0 -5.22 m 0 -7.5 l 0 -7.68 -0.18 -7.86 -0.36 -7.86 c -0.6 -7.86 -0.72 -7.68 -0.72 -7.5 c -0.72 -5.22 l -0.72 -5.04 -0.6 -4.86 -0.36 -4.86 c -0.18 -4.86 0 -5.04 0 -5.22 c h 0 -10.5 m 0 -12.72 l 0 -12.96 -0.18 -13.14 -0.36 -13.14 c -0.6 -13.14 -0.72 -12.96 -0.72 -12.72 c -0.72 -10.5 l -0.72 -10.32 -0.6 -10.14 -0.36 -10.14 c -0.18 -10.14 0 -10.32 0 -10.5 c h 0 -15.72 m 0 -18 l 0 -18.18 -0.18 -18.36 -0.36 -18.36 c -0.6 -18.36 -0.72 -18.18 -0.72 -18 c -0.72 -15.72 l -0.72 -15.54 -0.6 -15.36 -0.36 -15.36 c -0.18 -15.36 0 -15.54 0 -15.72 c h 2.64 -17.94 m -0.36 -23.94 l -3.36 -17.94 l f Q q 0.9700012 0 0 0.9700012 160.6111755 483.5951538 cm 1 0.203 0.004 rg 0 0 m 0 -2.22 l 0 -2.46 -0.12 -2.58 -0.36 -2.58 c -0.54 -2.58 -0.72 -2.46 -0.72 -2.22 c -0.72 0 l -0.72 0.24 -0.54 0.42 -0.36 0.42 c -0.12 0.42 0 0.24 0 0 c h 0 -5.22 m 0 -7.5 l 0 -7.68 -0.12 -7.86 -0.36 -7.86 c -0.54 -7.86 -0.72 -7.68 -0.72 -7.5 c -0.72 -5.22 l -0.72 -5.04 -0.54 -4.86 -0.36 -4.86 c -0.12 -4.86 0 -5.04 0 -5.22 c h 0 -10.5 m 0 -12.72 l 0 -12.96 -0.12 -13.08 -0.36 -13.08 c -0.54 -13.08 -0.72 -12.96 -0.72 -12.72 c -0.72 -10.5 l -0.72 -10.26 -0.54 -10.08 -0.36 -10.08 c -0.12 -10.08 0 -10.26 0 -10.5 c h 0 -15.72 m 0 -18 l 0 -18.18 -0.12 -18.36 -0.36 -18.36 c -0.54 -18.36 -0.72 -18.18 -0.72 -18 c -0.72 -15.72 l -0.72 -15.54 -0.54 -15.36 -0.36 -15.36 c -0.12 -15.36 0 -15.54 0 -15.72 c h 2.64 -17.58 m -0.36 -23.58 l -3.36 -17.58 l f Q q 0.9700012 0 0 0.9700012 199.3142242 484.2935638 cm 1 0.203 0.004 rg 0 0 m 0 -2.22 l 0 -2.46 -0.18 -2.64 -0.42 -2.64 c -0.6 -2.64 -0.78 -2.46 -0.78 -2.22 c -0.78 0 l -0.78 0.18 -0.6 0.36 -0.42 0.36 c -0.18 0.36 0 0.18 0 0 c h 0 -5.22 m 0 -7.5 l 0 -7.68 -0.18 -7.86 -0.42 -7.86 c 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Furt)4(her, i)4(n)-1( order )]TJ 0.0023 Tc 0.2936 Tw -12.773 -1.168 Td [(t)4(o)-2( ensure t)4(h)-2(e equi)4(val)4(e)2(ncy)4( of hy)4(gro-st)4(ress wi)4(t)4(h)-2(i)4(n)-2( di)4(fferent)4( )]TJ 0.0027 Tc 0.2033 Tw 0 -1.168 TD [(soak condi)5(t)5(i)5(ons, t)5(h)-1(e overal)5(l)5( m)13(o)-1(i)5(s)2(t)5(u)-1(re di)5(st)5(ri)5(but)5(i)5(on woul)5(d )6(be )]TJ 0.0833 Tw T* [(i)5(ndi)5(st)5(i)5(ngui)5(shabl)5(e)3(. )6(If t)5(h)-1(e l)5(e)3(vel)5( of t)5(o)-1(t)5(a)3(l)5( dri)5(v)-1(i)5(ng forces i)5(s)2( bel)5(o)-1(w )]TJ 0.0008 Tc 0.4751 Tw T* (the level of interface adhesi)Tj 0.0017 Tc 0.4742 Tw 12.977 0 Td (on strength, the failure of )Tj 0.0026 Tc 0.0174 Tw -12.977 -1.168 Td [(cracki)5(ng/)5(del)5(a)3(m)13(i)5(nat)5(i)5(on )6(woul)5(d )6(not)5( occur. Ot)5(herwi)5(s)2(e, t)5(h)-1(e fai)5(l)5(u)-1(re )]TJ 0.3473 Tw T* [(woul)5(d occur. If t)5(h)-1(e st)5(art)5( poi)5(nt)5(s of )6(cracki)5(ng/)5(del)5(a)3(m)13(i)5(nat)5(i)5(on )]TJ 0.0015 Tc 0.1265 Tw T* (occurrence of standard and acceler)Tj 0.0004 Tc 0.1276 Tw 14.441 0 Td [(ated tests are in the )-6(sam)10(e )]TJ -0.0001 Tc 0.386 Tw -14.441 -1.168 Td [(lev)-4(el, th)-4(e failu)-4(re rates b)-4(etw)-4(een)-4( tw)-4(o)-4( tests are treated)-4( as )]TJ 0.0025 Tc -0.0005 Tw T* [(equi)4(val)4(e)2(ncy)5(,)1( as shown i)4(n)-1( Fi)4(g. 3. )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 69.7608 614.1954 Tm ( )Tj ET q 242.6357574 0 0 167.1503601 55.7927856 444.658844 cm /Im0 Do Q BT /TT0 1 Tf 9.701 0 0 9.7194 298.4286 444.6006 Tm ( )Tj 0.0018 Tc 0.0002 Tw -23.206 -1.042 Td (Fig. 3: Methodology)Tj 0.001 Tc 0.001 Tw 8.279 0 Td [( of new m)11(o)-3(isture accelerated test )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 69.7608 425.802 Tm ( )Tj 0.0024 Tc 0.4375 Tw 9.701 0 0 9.7194 69.7608 414.2784 Tm [(To )-6(i)4(m)12(pl)4(em)12(ent)4( )-6(t)4(h)-1(e )-6(new m)12(e)2(t)4(hodol)4(ogy)5(, a novel)4( di)4(rect)4( )]TJ 0.0715 Tw -1.44 -1.168 Td [(concent)4(rat)4(i)4(on )6(approach )6(\(DCA\) )6(was devel)4(oped and appl)4(i)4(e)2(d i)4(n)-1( )]TJ -0.0007 Tc 0.2906 Tw T* [(th)-5(is stu)-5(d)-5(y)1( to)-5( d)-5(e)-1(term)9(in)-5(e th)-5(e eq)-5(u)-5(i)1(v)-5(a)-1(len)-5(c)-1(y o)-5(f)-4( lo)-5(cal )6(m)9(o)-5(istu)-5(re )]TJ -0.0005 Tc 0.3324 Tw T* [(co)-4(n)-4(cen)-4(tratio)-4(n)-4( as w)-4(e)-1(ll as th)-4(e o)-4(v)-4(e)-1(rall m)9(o)-4(istu)-4(re d)-4(i)1(strib)-4(u)-4(tio)-4(n)-4( )]TJ 0.0032 Tc 0.8207 Tw T* (under 30)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 98.2206 373.2474 Tm (o)Tj 0.0019 Tc 0.822 Tw 9.701 0 0 9.7194 101.3634 368.8824 Tm [(C/)4(60%RH, 60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 164.5104 373.2474 Tm (o)Tj 0.0022 Tc 0.8157 Tw 9.701 0 0 9.7194 167.6532 368.8824 Tm [(C/)4(60%RH and 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 252.7416 373.2474 Tm (o)Tj 0.0014 Tc 9.701 0 0 9.7194 255.8844 368.8824 Tm (C/60%RH, )Tj 0.0012 Tc 0.6247 Tw -20.626 -1.168 Td (respectively. The approach )Tj -0.0005 Tc 0.6204 Tw 12.953 0 Td [(can)-4( sim)9(u)-4(late th)-4(e m)9(o)-4(istu)-4(re )]TJ 0.0028 Tc 0.2631 Tw -12.953 -1.168 Td [(di)5(ffusi)5(on )-6(of t)5(h)-1(e package under bot)5(h const)5(a)3(nt)5( and vary)5(i)5(ng )]TJ -0.0005 Tc 0.1165 Tw T* [(am)9(b)-4(i)1(en)-4(t tem)9(p)-4(eratu)-4(r)-3(e an)-4(d)-4( h)-4(u)-4(m)9(id)-4(ity co)-4(n)-4(d)-4(itio)-4(n)-4(s)-1( [1)-4(8)-4(,)-2(1)-4(9)-4(]. )-6(In)-4( )-6(th)-4(e )]TJ 0.0013 Tc 0.3186 Tw T* [(approach, the m)11(o)-3(isture concentr)]TJ 0.0011 Tc 0.3128 Tw 13.823 0 Td [(ation )-6(is used as the field )]TJ 0.0022 Tc 0.0538 Tw -13.823 -1.168 Td [(vari)4(abl)4(e)2( di)4(rect)4(l)4(y)4( and const)4(r)-1(ai)4(nt)4( equat)4(i)4(on i)4(s)1( )-6(used )-6(t)4(o)-2( )-6(ensure )-6(t)4(h)-2(e )]TJ 0.0014 Tc 0.6425 Tw T* (interfacial continuous cond)Tj 0.001 Tc 0.6429 Tw 12.209 0 Td (ition. To validate the new )Tj 0.0025 Tc 0.1255 Tw -12.209 -1.168 Td [(m)12(e)2(t)4(hodol)4(ogy)5( and m)12(odel)4(i)4(ng resul)4(t)4(s)2(, t)4(h)-1(e m)12(o)-1(i)4(s)2(t)4(u)-1(re/)4(refl)4(o)-1(w )-6(t)4(e)2(st)4(s )]TJ 0.0022 Tc 0.1498 Tw T* [(were perform)12(ed under the conditions of MSL-3 and 30hrs-, )]TJ 0.0029 Tc 0.0171 Tw T* [(45hrs-, 60hrs-, 75hrs-, )-6(88hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 180.69 271.1065 Tm (o)Tj 0.0025 Tc 0.0235 Tw 9.701 0 0 9.7194 183.8328 266.7415 Tm [(C/)4(60%RH and 30hrs-, 45hrs-)]TJ 0.003 Tc 0.161 Tw -13.199 -1.168 Td (, 60hrs-85)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 96.9984 259.7575 Tm (o)Tj 0.0009 Tc 0.1571 Tw 9.701 0 0 9.7194 100.1412 255.3925 Tm [(C/60%RH, )-6(respectively. )-6(The sam)11(p)-3(le size was 48 )]TJ 0.0015 Tc 0.1805 Tw -4.572 -1.168 Td (units for each condition. The e)Tj 0.0018 Tc 0.1802 Tw [(xperim)12(e)2(ntal procedures )6(used )]TJ 0.0021 Tc 0.0599 Tw T* [(were:)4( )6(Fi)4(rst)4(l)4(y)4(, t)4(h)-2(e t)4(h)-2(ru-scanni)4(ng acoust)4(i)4(c)2( m)12(i)4(croscope \(TSAM)3(\))-1( )]TJ 0.001 Tc 0.6309 Tw T* (was adopted for the initial )Tj 0.0018 Tc 0.6301 Tw 13.877 0 Td (inspection to ensure no )Tj 0.0025 Tc 0.1615 Tw -13.877 -1.168 Td [(cracki)4(ng/)4(del)4(a)2(m)12(i)4(nat)4(i)4(on occurri)4(ng before m)12(o)-1(i)4(s)2(t)4(u)-1(re/)4(refl)4(o)-1(w )6(t)4(e)2(st)4(. )]TJ 0.0116 Tw T* [(Al)4(l)4( )6(t)4(h)-1(e )6(packages )6(were baked for 24hrs at)4( 125)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 233.0118 203.0124 Tm (o)Tj -0.0007 Tc 0.0147 Tw 9.701 0 0 9.7194 236.1546 198.6474 Tm [(C to)-5( rem)9(o)-5(v)-5(e)-1( th)-5(e )]TJ 0.0004 Tc 0.1576 Tw -18.592 -1.168 Td [(initial m)10(o)-3(isture inside. Secondly,)]TJ 0.0013 Tc 0.1567 Tw 13.679 0 Td ( the packages )Tj 0.0018 Tc 0.1502 Tw 6.119 0 Td (absorbed the )Tj 0.0015 Tc 0.0305 Tw -19.798 -1.168 Td [(m)11(o)-2(isture under the above conditions. After )-6(the )-6(m)11(o)-2(isture )-6(soak, )]TJ 0.0012 Tc 0.1208 Tw T* [(the packages were subjected )-6(to)]TJ 0.1267 Tw 12.917 0 Td ( 3 cycles of JEDEC standard )Tj -0.0003 Tc 0.0143 Tw -12.917 -1.168 Td [(reflo)-4(w)-4( w)-4(ith)-4( th)-4(e p)-4(eak)]TJ 0.0015 Tc 0.0185 Tw 8.315 0 Td [( )6(tem)11(p)-2(erature of 260)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 213.3984 157.6165 Tm (o)Tj 0.02 Tw 9.701 0 0 9.7194 216.5412 153.2515 Tm [(C. Lastly, th)-4(e TSA)-4(M)1( )]TJ -0.0002 Tc 0.3201 Tw -16.57 -1.168 Td [(w)-4(as u)-4(s)-1(ed)-4( ag)-4(ain)-4( fo)-4(r th)-4(e fin)-4(al in)-4(sp)-4(ectio)-4(n)-4( to)-4( d)-4(eterm)10(in)-4(e )6(th)-4(e )]TJ 0.0003 Tc 0.0077 Tw T* [(failu)-4(re )6(rate. A)-3( 3)-4(D)-3( u)-4(ltra-th)-4(in)-4( stack)-4(ed)-4(-d)-4(ie CSP w)-3(as em)10(p)-4(l)2(o)-4(y)2(ed)-4( as )]TJ 0.0023 Tc 0.1077 Tw T* [(t)4(e)2(st)4( vehi)4(cl)4(e for bot)4(h num)12(eri)4(cal)4( )-6(si)4(m)12(u)-2(l)4(a)2(t)4(i)4(ons )-6(and )-6(experi)4(m)12(e)2(nt)4(al)4( )]TJ 0.0027 Tc 0.4432 Tw T* [(val)5(i)5(d)-1(at)5(i)5(on, as shown i)5(n)-1( Fi)5(g. 4. It)5( )6(consi)5(s)2(t)5(s)2( )6(of )6(m)13(o)-1(l)5(d)-1(i)5(ng )]TJ 0.0017 Tc 0.2882 Tw T* [(com)12(pound \(MC\), silicon die, die-a)]TJ 0.0005 Tc 0.2894 Tw 15.022 0 Td [(ttach film)10(, solder )6(resist )]TJ 0.0018 Tc 0.2581 Tw -15.022 -1.168 Td [(\(SR\) and bi)4(sm)12(al)4(ei)4(m)12(i)4(de-t)4(ri)4(azi)4(ne )]TJ 0.2521 Tw 13.583 0 Td (\(BT\) core. In the previous )Tj 0.0023 Tc 0.1977 Tw -13.583 -1.168 Td [(st)4(udy)4(, m)12(o)-2(st)4( cracki)4(ng/)4(del)4(a)2(m)12(i)4(nat)4(i)4(on fai)4(l)4(u)-2(re )6(of )6(di)4(e-at)4(t)4(ach )6(fi)4(l)4(m)12( )]TJ 0.4076 Tw T* [(was )-6(found )-6(i)4(n)-2( t)4(h)-2(e bot)4(t)4(o)-2(m)12( fi)4(l)4(m)12(. Therefore, t)4(h)-2(e st)4(udy)4( of )]TJ 0.0028 Tc 1.0671 Tw 26.493 68.168 Td [(m)13(o)-1(i)5(s)2(t)5(u)-1(re )-6(di)5(st)5(ri)5(but)5(i)5(on and dri)5(v)-1(i)5(n)-1(g forces i)5(n)-1(duci)5(ng )]TJ -0.0005 Tc 0.3264 Tw T* [(crack)-4(in)-4(g)-4(/)1(d)-4(e)-1(lam)9(i)1(n)-4(a)-1(tio)-4(n)-4( fo)-4(cu)-4(sed)-4( o)-4(n)-4( th)-4(e b)-4(o)-4(tto)-4(m)9( film)9( in)-4( th)-4(is )]TJ 0.0022 Tc 0 Tw T* (paper. )Tj 0 Tc 5.8088 0 0 5.82 326.772 693.6384 Tm ( )Tj 9.701 0 0 9.7194 557.244 637.4172 Tm ( )Tj -25.197 -1.042 Td ( )Tj 0 -1.27 TD ( )Tj 0.0018 Tc 0.0002 Tw 3.372 -1.27 Td [(Fi)4(g. 4:)4( The schem)12(a)2(t)4(i)4(c)2( st)4(ruct)4(ure of t)4(e)2(st)4( vehi)4(cl)4(e )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 326.772 593.9418 Tm ( )Tj /TT1 1 Tf 0.0016 Tc 0.0004 Tw 9.701 0 0 9.7194 312.804 577.413 Tm (Modeling and Simulation )Tj /TT2 1 Tf 0.0039 Tc 0 Tw 0 -1.258 TD (1.)Tj /TT3 1 Tf 0 Tc 0.756 0 Td ( )Tj /TT2 1 Tf -0.0007 Tc 0.0027 Tw 0.594 0 Td [(Mo)-5(istu)-5(re D)-4(iffu)-5(sio)-5(n)-5( Mo)-5(d)-5(e)-1(lin)-5(g)-5( )]TJ /TT0 1 Tf -0.0003 Tc 0.1883 Tw 0.09 -1.27 Td [(Th)-4(e m)10(o)-4(istu)-4(re so)-4(ak)-4( h)-4(i)2(sto)-4(r)-3(ies at )6(th)-4(e )6(b)-4(o)-4(tto)-4(m)10( )6(film)10(/su)-4(b)-4(strate )]TJ 0.0017 Tc 1.3861 Tw -1.44 -1.168 Td (interface under 30)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 410.58 545.8686 Tm (o)Tj 0.0019 Tc 1.3799 Tw 9.701 0 0 9.7194 413.7228 541.5036 Tm [(C/)4(60%RH, 60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 482.2824 545.8686 Tm (o)Tj 0.0019 Tc 1.3799 Tw 9.701 0 0 9.7194 485.4252 541.5036 Tm [(C/)4(60%RH and )]TJ 0.0039 Tc 0 Tw -17.794 -1.168 Td (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 534.5197 Tm (o)Tj 0.0018 Tc 0.4741 Tw 9.701 0 0 9.7194 325.7244 530.1547 Tm [(C/)4(60%RH )-6(are )-6(shown i)4(n)-2( Fi)4(g 5. The l)4(o)-2(cal)4( m)12(o)-2(i)4(s)1(t)4(u)-2(re )]TJ 0.0008 Tc 0.1212 Tw -1.332 -1.168 Td (concentration at the interface is)Tj 0.0019 Tc 0.1261 Tw 13.061 0 Td [( )6(saturated after 100hrs under )]TJ 0.0039 Tc 0 Tw -13.061 -1.168 Td (30)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 511.8216 Tm (o)Tj 0.0024 Tc 0.2935 Tw 9.701 0 0 9.7194 325.7244 507.4566 Tm [(C/)4(60%RH, 40hrs under 60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 438.2832 511.8216 Tm (o)Tj 0.0024 Tc 0.2935 Tw 9.701 0 0 9.7194 441.426 507.4566 Tm [(C/)4(60%RH and 25hrs under )]TJ 0.0039 Tc 0 Tw -13.259 -1.168 Td (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 500.4726 Tm (o)Tj 0.0023 Tc 0.1317 Tw 9.701 0 0 9.7194 325.7244 496.1076 Tm [(C/)4(60%RH. It)4( m)12(eans from)12( 40hrs under )-6(60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 494.3298 500.4726 Tm (o)Tj 0.0021 Tc 0.1379 Tw 9.701 0 0 9.7194 497.4726 496.1076 Tm [(C/)4(60%RH and )]TJ 0.003 Tc 0.029 Tw -19.036 -1.168 Td (25hrs under 85)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 371.9934 489.1236 Tm (o)Tj -0.0006 Tc 0.0326 Tw 9.701 0 0 9.7194 375.1362 484.7586 Tm [(C/6)-5(0)-4(%RH)-4(,)-3( th)-4(e lo)-5(cal m)9(o)-4(istu)-5(re co)-4(n)-4(cen)-5(tratio)-5(n)-4( is )]TJ 0.0026 Tc 0.0114 Tw -6.425 -1.168 Td [(equi)5(val)5(e)3(nt)5( wi)5(t)5(h)-1( t)5(h)-1(at)5( under M)4(S)1(L-3. However, i)5(t)5( does not)5( )-6(m)13(ean )]TJ 0.003 Tc 0.071 Tw 0 -1.168 TD [(40hrs under )-6(60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 372.8664 466.4256 Tm (o)Tj 0.0025 Tc 0.0775 Tw 9.701 0 0 9.7194 376.0092 462.0606 Tm [(C/)4(60%RH and 25hrs under 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 497.1234 466.4256 Tm (o)Tj 0.0013 Tc 0.0787 Tw 9.701 0 0 9.7194 500.2662 462.0606 Tm (C/60%RH are )Tj 0.0027 Tc -0.0007 Tw -19.324 -1.168 Td [(equi)5(val)5(e)3(nt)5( wi)5(t)5(h)-1( M)4(S)1(L-3. )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 326.772 442.0398 Tm ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 315.24 264.66 246.06 174.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 308.82 116.52 0.12 re W n 1 0 0 1 356.9999685 308.9399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 322.62 116.52 0.12 re W n 1 0 0 1 356.9999685 322.7399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 336 196.32 0.12 re W n 1 0 0 1 356.9999685 336.119978 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 349.8 196.32 0.12 re W n 1 0 0 1 356.9999685 349.919978 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 363.18 196.32 0.06 re W n 1 0 0 1 356.9999685 363.2399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 376.92 196.32 0.12 re W n 1 0 0 1 356.9999685 377.0399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 390.3 196.32 0.12 re W n 1 0 0 1 356.9999685 390.4199622 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 404.1 196.32 0.12 re W n 1 0 0 1 356.9999685 404.2199622 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 417.48 196.32 0.12 re W n 1 0 0 1 356.9999685 417.5999685 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 431.22 196.32 0.12 re W n 1 0 0 1 356.9999685 431.3399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 355.2904053 430.4002991 cm 0.5 0.5 0.5 RG 0.418 w 1 j 1 J 0 0 m 196.32 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 563.4 440.94 -250.2 -177.96 re 313.2 440.94 m h 553.38 332.76 -79.8 -36.78 re W* n 1 0 0 1 553.3199622 431.3399717 cm 0.5 0.5 0.5 RG 0.418 w 1 j 1 J 0 0 m 0 -135.72 l S Q q 0.9700012 0 0 0.9700012 545.7210388 298.7517395 cm 0.5 0.5 0.5 RG 0.418 w 1 j 1 J 0 0 m -196.32 0 l -196.32 135.72 l S Q q 0.9700012 0 0 0.9700012 355.2904053 430.4002991 cm 0 0 0 RG 0.06 w 1 j 1 J 0 0 m 0 -135.72 l -2.88 -135.72 m 0 -135.72 l -2.88 -122.4 m 0 -122.4 l -2.88 -108.6 m 0 -108.6 l -2.88 -95.22 m 0 -95.22 l -2.88 -81.42 m 0 -81.42 l -2.88 -68.1 m 0 -68.1 l -2.88 -54.3 m 0 -54.3 l -2.88 -40.92 m 0 -40.92 l -2.88 -27.12 m 0 -27.12 l -2.88 -13.74 m 0 -13.74 l -2.88 0 m 0 0 l 0 -135.72 m 196.32 -135.72 l 0 -138.66 m 0 -135.72 l 39.3 -138.66 m 39.3 -135.72 l 78.54 -138.66 m 78.54 -135.72 l 117.84 -138.66 m 117.84 -135.72 l 157.08 -138.66 m 157.08 -135.72 l 196.32 -138.66 m 196.32 -135.72 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 295.56 4.92 5.76 re W n 1 0 0 1 356.9999685 295.619978 cm 1 0 0 RG 1.253 w 1 j 1 J 0 0 m 2.1 2.04 l 3.36 3.3 l 4.2 4.98 l S Q q 0.9700012 0 0 0.9700012 359.3644104 303.5823364 cm 1 0 0 RG 1.253 w 1 j 1 J 0 0 m 0.84 2.1 l 2.1 4.62 l 4.2 9.6 l 6.3 15.06 l 8.34 20.46 l 10.44 26.34 l 12.96 31.74 l 15.06 36.78 l 17.16 41.76 l 19.2 46.8 l 21.3 51.36 l 23.4 55.56 l 25.5 59.76 l 27.6 63.48 l 29.64 66.84 l 31.74 70.2 l 33.84 73.5 l 35.94 76.44 l 38.46 78.96 l 40.5 81.48 l 42.6 84 l 46.8 88.14 l 48.9 90.24 l 50.94 91.92 l 53.04 93.6 l 55.14 94.86 l 59.34 97.74 l 63.48 100.26 l 68.1 102.36 l 72.24 104.04 l 76.44 105.72 l 80.64 106.92 l 84.78 108.18 l 88.98 109.02 l 93.18 109.86 l 97.74 110.7 l 101.94 111.54 l 106.08 111.96 l 110.28 112.8 l 114.48 113.22 l 118.62 113.64 l 120.3 113.64 l 123.24 114.06 l 127.38 114.06 l 129.9 114.48 l 138.66 114.48 l 144.12 114.9 l 146.64 114.9 l 148.68 115.32 l 155.82 115.32 l 158.76 115.74 l 165.42 115.74 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 525.9 415.5 27.9 1.92 re W n 1 0 0 1 526.6199622 416.3399717 cm 1 0 0 RG 1.253 w 1 j 1 J 0 0 m 14.64 0 l 20.04 0.42 l 42.6 0.42 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 295.56 1.62 5.76 re W n 1 0 0 1 356.9999685 295.619978 cm 0 0 1 RG 1.253 w 1 j 1 J 0 0 m 0.42 2.04 l 0.84 3.3 l 0.84 4.98 l S Q q 0.9700012 0 0 0.9700012 356.1052094 303.5823364 cm 0 0 1 RG 1.253 w 1 j 1 J 0 0 m 0 2.1 l 0.42 4.2 l 0.84 9.18 l 1.26 14.64 l 1.68 20.46 l 2.52 31.32 l 2.94 36.78 l 3.78 41.76 l 4.2 46.8 l 4.62 51.36 l 5.04 55.56 l 5.46 59.76 l 5.88 63.48 l 6.3 67.26 l 6.72 70.62 l 7.14 73.5 l 7.98 78.96 l 8.4 81.48 l 8.82 84 l 9.66 88.14 l 10.44 91.92 l 10.86 93.6 l 11.7 95.28 l 12.12 96.48 l 12.54 97.74 l 13.38 100.26 l 14.22 102.36 l 15.06 104.04 l 15.9 105.72 l 16.74 106.92 l 17.58 108.18 l 18 109.02 l 18.84 109.44 l 19.68 110.28 l 20.52 111.12 l 21.3 111.54 l 22.14 112.38 l 22.98 112.8 l 23.82 113.22 l 24.66 113.64 l 25.5 114.06 l 26.34 114.48 l 27.6 114.9 l 30.12 115.32 l 32.16 115.74 l 36.78 115.74 l 38.88 116.16 l 45.54 116.16 l 47.22 116.58 l 87.72 116.58 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 357.06 295.56 4.14 67.98 re W n 1 0 0 1 356.9999685 295.619978 cm 0 1 0 RG 1.253 w 1 j 1 J 0 0 m 0.42 8.76 l 0.84 17.52 l 1.68 35.88 l 2.1 44.7 l 2.52 52.62 l 2.94 60.54 l 3.36 67.2 l S Q q 0.9700012 0 0 0.9700012 358.5496063 363.9358215 cm 0 1 0 RG 1.253 w 1 j 1 J 0 0 m 0.42 5.88 l 0.84 11.28 l 1.26 15.9 l 1.68 20.1 l 2.1 23.82 l 2.52 27.18 l 3.36 33.42 l 4.2 38.04 l 5.04 41.4 l 5.88 44.34 l 6.72 46.38 l 7.56 48.06 l 8.34 49.74 l 11.28 52.68 l 12.96 53.1 l 16.32 53.94 l 19.62 54.36 l 37.2 54.36 l 41.76 54.78 l 45.96 54.78 l S Q BT /TT0 1 Tf 8.5084 0 0 8.5095 343.9992 295.2013 Tm (0)Tj 0.0199 Tc -0.759 1.518 Td [(0.)31(5)]TJ 0 Tc 0.759 1.573 Td (1)Tj 0.0199 Tc -0.759 1.525 Td [(1.)31(5)]TJ 0 Tc 0.759 1.573 Td (2)Tj 0.0199 Tc -0.759 1.525 Td [(2.)31(5)]TJ 0 Tc 0.759 1.566 Td (3)Tj 0.0199 Tc -0.759 1.525 Td [(3.)31(5)]TJ 0 Tc 0.759 1.573 Td (4)Tj 0.0199 Tc -0.759 1.525 Td [(4.)31(5)]TJ 0 Tc 0.759 1.566 Td (5)Tj 3.4537 Tc 1.094 -16.996 Td [(0)-239(2)3434(04)3427(06)3434(08)3427(0)239(1)3434(0)3427(0)]TJ 0.0022 Tc -0.0128 Tw 9.385 -1.046 Td [(T)45(i)-7(m)21(e)15( \(h)30(rs)8(\))]TJ 0.0105 Tc -0.0211 Tw 0 8.5084 -8.5095 0 333.5232 312.894 Tm [(Mo)-16(i)8(s)17(tu)-9(r)8(e)23( C)14(o)-16(n)-9(c)23(e)23(n)-9(tr)8(a)30(tio)-16(n)-9( \()8(k)-9(g)-16(/)1(m)]TJ 0 Tc 0 Tw 0 5.6723 -5.6729 0 328.9254 415.3842 Tm (3)Tj 0 8.5084 -8.5095 0 333.5232 418.236 Tm (\))Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 0 0 0 RG 0.06 w 1 j 1 J 473.58 332.76 79.32 -36.72 re B* Q q 0.9700012 0 0 0.9700012 478.9073486 328.7247772 cm 1 0 0 RG 1.253 w 1 j 1 J 0 0 m 11.28 0 l S Q BT /TT0 1 Tf 0.0258 Tc 8.5084 0 0 8.5095 491.8853 325.1742 Tm [(30)6(C)22(/)23(60%R)29(H)]TJ ET q 0.9700012 0 0 0.9700012 478.9073486 316.9683533 cm 0 0 1 RG 1.253 w 1 j 1 J 0 0 m 11.28 0 l S Q BT /TT0 1 Tf 8.5084 0 0 8.5095 491.8853 313.4178 Tm [(60)6(C)22(/)23(60%R)29(H)]TJ ET q 0.9700012 0 0 0.9700012 478.9073486 305.619339 cm 0 1 0 RG 1.253 w 1 j 1 J 0 0 m 11.28 0 l S Q BT /TT0 1 Tf 8.5084 0 0 8.5095 491.8853 302.0688 Tm [(85)6(C)22(/)23(60%R)29(H)]TJ 0 Tc 9.701 0 0 9.7194 555.5562 267.0324 Tm ( )Tj 0.0026 Tc 0.7133 Tw -25.023 -1.042 Td [(Fi)5(g. 5:)5( M)4(o)-1(i)5(s)2(t)5(u)-1(re soak )6(hi)5(st)5(ori)5(e)3(s )6(under )6(30)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 509.7527 261.2706 Tm (o)Tj 0.0013 Tc 9.701 0 0 9.7194 512.8956 256.9057 Tm [(C/60)-3(%RH, )]TJ 0.0039 Tc -20.626 -1.168 Td (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 249.9217 Tm (o)Tj 0.0022 Tc -0.0002 Tw 9.701 0 0 9.7194 325.7244 245.5567 Tm [(C/)4(60%RH and 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 394.9824 249.9217 Tm (o)Tj 0.0012 Tc 9.701 0 0 9.7194 398.1252 245.5567 Tm (C/60%RH )Tj 0 Tc -8.795 -1.27 Td ( )Tj -0.0001 Tc 0.902 Tw 1.35 -1.27 Td [(To)-4( d)-4(eterm)10(in)-4(e th)-4(e eq)-4(u)-4(i)2(v)-4(alen)-4(t)2( so)-4(ak)-4( tim)10(es )6(u)-4(n)-4(d)-4(er )]TJ 0.0039 Tc 0 Tw -1.35 -1.168 Td (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 213.8958 Tm (o)Tj 0.0022 Tc 0.7137 Tw 9.701 0 0 9.7194 325.7244 209.5308 Tm [(C/)4(60%RH and 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 408.834 213.8958 Tm (o)Tj -0.0006 Tc 0.7165 Tw 9.701 0 0 9.7194 411.9768 209.5308 Tm [(C/6)-4(0)-5(%RH)-4(,)-3( th)-4(e o)-4(v)-4(e)-1(rall m)9(o)-4(istu)-4(re )]TJ 0.0024 Tc 0.2275 Tw -10.223 -1.168 Td [(di)4(st)4(ri)4(but)4(i)4(on )-6(i)4(n)-1( t)4(h)-1(e package woul)4(d be i)4(nvest)4(i)4(g)-1(at)4(ed. FEA of )]TJ 0.0027 Tc 0.2932 Tw T* [(m)13(o)-1(i)5(s)2(t)5(u)-1(re )-6(di)5(ffusi)5(on )-6(was )-6(perform)13(ed for M)4(S)1(L-3 and 45hrs-, )]TJ 0.0033 Tc 0 Tw T* (70hrs-60)Tj 0 Tc 6.2736 0 0 6.2856 347.5494 179.8489 Tm (o)Tj 0.0026 Tc 0.4493 Tw 9.701 0 0 9.7194 350.6922 175.4839 Tm [(C/)5(60%RH and 25hrs-, 45hrs-85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 487.8695 179.8489 Tm (o)Tj 0.0014 Tc 0.4445 Tw 9.701 0 0 9.7194 491.0124 175.4839 Tm (C/60%RH. The )Tj 0.0025 Tc 0.1855 Tw -18.37 -1.168 Td [(m)12(odel)4(i)4(ng )-6(resul)4(t)4(s)2( )-6(are )-6(shown )-6(i)4(n)-1( Fi)4(g. 6. Com)12(p)-1(ari)4(n)-1(g Fi)4(g. 6\(a\) )]TJ -0.0007 Tc 0.0747 Tw T* [(w)-4(ith)-5( )6(Fig)-5(.)-3( )6(6)-5(\()-4(b)-5(\))-4(, )6(it is o)-5(b)-5(s)-1(erv)-5(e)-1(d)-5( th)-5(at alth)-5(o)-5(u)-5(g)-5(h)-5( th)-5(e lo)-5(cal m)9(o)-5(istu)-5(re )]TJ 0.001 Tc 0.157 Tw T* [(concentration at bottom)11( film)11( )]TJ 0.0018 Tc 0.1502 Tw 12.299 0 Td [(reaches )-6(the sam)12(e)2( under 45hrs-)]TJ 0.0039 Tc 0 Tw -12.299 -1.168 Td (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 134.4529 Tm (o)Tj 0.0026 Tc 0.0054 Tw 9.701 0 0 9.7194 325.7244 130.0879 Tm [(C/)5(60%RH as t)5(h)-1(at)5( under M)4(S)1(L-3, t)5(h)-1(e )-6(overal)5(l)5( )-6(equi)5(val)5(e)3(ncy)5( )-6(of )]TJ 0.001 Tc 0.067 Tw -1.332 -1.168 Td [(m)11(o)-3(isture )6(distribution is not reach)]TJ 0.0001 Tc 0.0679 Tw [(ed yet at this tim)10(e. Not only )]TJ -0.0006 Tc 0.1286 Tw T* [(th)-4(e lo)-4(cal m)9(o)-4(istu)-4(re co)-4(n)-4(cen)-4(tratio)-4(n)-4( at th)-4(e )-6(b)-4(o)-4(tto)-4(m)9( )-6(film)9(/su)-4(b)-5(strate )]TJ 0.0005 Tc 0.1635 Tw T* [(interface but also overall m)10(o)-3(istu)]TJ 0.002 Tc 0.156 Tw 13.559 0 Td (re distribution under 70hrs-)Tj 0.0039 Tc 0 Tw -13.559 -1.168 Td (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 89.0568 Tm (o)Tj 0.0022 Tc 0.2277 Tw 9.701 0 0 9.7194 325.7244 84.6918 Tm [(C/)4(60%RH )-6(are )-6(equi)4(val)4(e)2(nt)4( )-6(wi)4(t)4(h)-2( t)4(h)-2(at)4( of soak for M)4(SL-3. )]TJ 0.0025 Tc 0.1195 Tw -1.332 -1.168 Td [(Si)4(m)12(i)4(l)4(a)2(rl)4(y)5(,)1( t)4(h)-1(e overal)4(l)4( equi)4(val)4(e)2(ncy)5( of m)12(o)-1(i)4(s)2(t)4(u)-1(re )-6(di)4(st)4(ri)4(but)4(i)4(on )-6(i)4(s)2( )]TJ 0.002 Tc 0.2639 Tw T* [(not )-6(reached )-6(yet under MSL-3 and 25hrs-85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 496.6577 66.3588 Tm (o)Tj 0.0011 Tc 0.2648 Tw 9.701 0 0 9.7194 499.8005 61.9938 Tm [(C/60)-3(%RH, as )]TJ ET q 244.4970093 0 0 53.8350067 312.8039703 637.4171753 cm /Im1 Do Q BT /TT0 1 Tf -0.0016 Tc 0 Tw 9.701 0 0 9.7194 348.7716 620.481 Tm [(MC)-2646(D)-5(ie)-2755(F)-3(il)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 434.28 625.92 18.78 10.38 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /TT0 1 Tf 0 Tc 9.701 0 0 9.7194 441.0185 620.4809 Tm (m)Tj ET Q BT /TT0 1 Tf -0.0004 Tc 2.2701 Tw 9.701 0 0 9.7194 448.4682 620.481 Tm [( SR )-456(BT)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 349.02 635.88 18 6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 RG 0.75 w 8 M 1 J 367.02 641.88 -18 -6 re 349.02 641.88 m h S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.59 0.59 0.59 rg 391.02 635.88 18 6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.59 0.59 0.59 RG 0.75 w 8 M 1 J 409.02 641.88 -18 -6 re 391.02 641.88 m h S Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.004 0.004 rg 433.02 635.88 18 6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.004 0.004 RG 0.75 w 8 M 1 J 451.02 641.88 -18 -6 re 433.02 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The equi)5(val)5(e)3(nt)5( dri)5(v)-1(i)5(ng )6(forces )6(for )]TJ 0.0024 Tc 0.3055 Tw T* [(cracki)4(ng/)4(del)4(a)2(m)12(i)4(nat)4(i)4(on )-6(coul)4(d achi)4(e)2(ve t)4(h)-1(e equi)4(val)4(e)2(nt)4( fai)4(l)4(u)-1(re )]TJ 0.4434 Tw T* [(m)12(ode )-6(and fai)4(l)4(u)-1(re rat)4(e)2( aft)4(e)2(r soak under M)4(S)1(L-3, 70hrs-)]TJ 0.0039 Tc 0 Tw T* (60)Tj 0 Tc 6.2736 0 0 6.2856 65.5704 99.3583 Tm (o)Tj 0.0025 Tc -0.0005 Tw 9.701 0 0 9.7194 68.7132 94.9933 Tm [(C/)4(60%RH and 45hrs-85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 162.939 99.3583 Tm (o)Tj 0.0014 Tc 9.701 0 0 9.7194 166.0818 94.9933 Tm (C/60%RH. )Tj 0 Tc 5.8088 0 0 5.82 69.7608 86.3215 Tm ( )Tj 0 -1.35 TD ( )Tj T* ( )Tj /TT1 1 Tf 0.0039 Tc 9.701 0 0 9.7194 312.804 725.0083 Tm (2.)Tj /TT2 1 Tf 0 Tc 0.756 0 Td ( )Tj /TT1 1 Tf 0.0021 Tc -0.0001 Tw 0.594 0 Td [(Vapor Pressure Model)4(i)4(ng )]TJ /TT0 1 Tf 0.0018 Tc 0.3541 Tw 0.09 -1.27 Td [(To val)4(i)4(d)-2(at)4(e t)4(h)-2(e equi)4(val)4(e)2(ncy)4( of vapor pressure at)4( )6(t)4(h)-2(e )]TJ 0.0032 Tc 0.3767 Tw -1.44 -1.168 Td [(condi)5(t)5(i)5(ons of )6(70hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 408.4266 705.6858 Tm (o)Tj 0.0024 Tc 0.3715 Tw 9.701 0 0 9.7194 411.5694 701.3208 Tm [(C/)4(60%RH and M)4(S)1(L-3 duri)4(ng t)4(h)-1(e )]TJ 0.0023 Tc 0.1437 Tw -10.181 -1.168 Td [(refl)4(ow process, t)4(h)-2(e vapor pressure )-6(m)12(odel)4(i)4(ng )-6(was )-6(perform)12(ed )]TJ 0.0024 Tc 0.0056 Tw 0 -1.168 TD [(based on t)4(h)-1(e si)4(m)12(p)-1(l)4(i)4(f)-1(i)4(e)2(d m)12(i)4(crom)12(echani)4(c)2(s vapor pressure m)12(o)-1(del)4( )]TJ 0.0116 Tw T* [([18,19])5(. )6(The si)4(m)12(p)-1(l)4(i)4(f)-1(i)4(e)2(d m)12(i)4(crom)12(echani)4(c)2(s vapor pressure m)12(o)-1(del)4( )]TJ 0.0022 Tc 0.0718 Tw T* [(was )6(devel)4(oped )6(wi)4(t)4(h)-2( t)4(h)-2(e user-defi)4(n)-2(ed subrout)4(i)4(n)-2(e based on t)4(h)-2(e )]TJ 0.0025 Tc 0.1735 Tw T* [(wi)4(del)4(y)5( used m)12(i)4(crom)12(echani)4(c)2(s vapor )6(pressure )6(m)12(odel)4( )6([14-17])6(. )]TJ 0.0028 Tc 0.0112 Tw T* [(Fi)5(g. )6(7 )6(shows t)5(h)-1(e cont)5(ours of vapor pressure di)5(st)5(ri)5(but)5(i)5(on under )]TJ 0.003 Tc 0.6229 Tw T* [(M)4(S)1(L-3 and 45hrs-, )6(70hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 442.59 626.2428 Tm (o)Tj 0.0016 Tc 0.6183 Tw 9.701 0 0 9.7194 445.7328 621.8778 Tm [(C/)4(60%RH at)4( t)4(h)-2(e refl)4(ow )]TJ 0.0017 Tc 0.0483 Tw -13.703 -1.168 Td [(tem)12(p)-2(erature of 260)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 387.7656 614.8938 Tm (o)Tj 0.002 Tc 0.048 Tw 9.701 0 0 9.7194 390.9084 610.5288 Tm [(C. The vapor pressure i)4(s)1( equi)4(val)4(e)2(nt)4( at)4( t)4(h)-2(e )]TJ 0.0032 Tc 0.5207 Tw -8.051 -1.168 Td [(condi)5(t)5(i)5(ons of 70hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 411.2784 603.5448 Tm (o)Tj 0.0021 Tc 0.5158 Tw 9.701 0 0 9.7194 414.4212 599.1798 Tm [(C/)4(60%RH and M)3(SL-3. Al)4(so as )]TJ 0.0025 Tc 0.2454 Tw -10.475 -1.168 Td [(i)4(ndi)4(cat)4(ed )-6(by)5( t)4(h)-1(e resul)4(t)4(s)2( of vapor pressure m)12(odel)4(i)4(n)-1(g under )]TJ 0.0039 Tc 0 Tw T* (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 580.8468 Tm (o)Tj 0.0021 Tc 0.2758 Tw 9.701 0 0 9.7194 325.7244 576.4818 Tm [(C/)4(60%RH, t)4(h)-2(e vapor pressure i)4(s)1( al)4(so )6(equi)4(val)4(e)2(nt)4( )6(under )]TJ 0.0033 Tc 0 Tw -1.332 -1.168 Td (45hrs-85)Tj 0 Tc 6.2736 0 0 6.2856 347.5494 569.4978 Tm (o)Tj 0.0021 Tc -0.0001 Tw 9.701 0 0 9.7194 350.6922 565.1328 Tm [(C/)4(60%RH and M)3(SL-3. )]TJ 0 Tc 0 Tw 5.8088 0 0 5.82 326.772 556.461 Tm ( )Tj 0.002 Tc 9.701 0 0 9.7194 312.804 488.4834 Tm ( )Tj 14.819 0 Td ( )Tj 0 Tc 10.456 -5.665 Td ( )Tj 0.0023 Tc -13.307 -1.042 Td (\(a\) )Tj 0 Tc 0.558 -1.27 Td ( )Tj 12.767 -5.862 Td ( )Tj 0.0032 Tc -13.355 -1.042 Td (\(b\) )Tj 0 Tc 0.588 -1.27 Td ( )Tj 12.737 -5.898 Td ( )Tj 0.0023 Tc -13.295 -1.042 Td (\(c\) )Tj 0.0024 Tc 0.2575 Tw -11.969 -1.27 Td [(Fi)4(g. 7:)4( Vapor pressure cont)4(ours \(at)4( refl)4(ow )6(t)4(e)2(m)12(p)-2(erat)4(ure )6(of )]TJ 0.004 Tc 0 Tw T* (260)Tj 0 Tc 6.2736 0 0 6.2856 327.4704 244.7418 Tm (o)Tj 0.0028 Tc 0.0292 Tw 9.701 0 0 9.7194 330.6132 240.3768 Tm [(C\) of soak under \(a\) M)4(S)1(L-3 and )-6(\(b\) )-6(45hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 509.7527 244.7418 Tm (o)Tj 0.0013 Tc 9.701 0 0 9.7194 512.8956 240.3768 Tm [(C/60)-3(%RH, )]TJ 0.003 Tc -0.001 Tw -20.626 -1.168 Td (\(c\) 70hrs-60)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 360.819 233.3929 Tm (o)Tj 0.0012 Tc 9.701 0 0 9.7194 363.9618 229.0279 Tm (C/60%RH )Tj /TT3 1 Tf 0.0002 Tc 0.0018 Tw -5.274 -1.784 Td [(Ex)-4(perimenta)-4(l)2( V)-4(a)-4(lida)-4(t)-3(io)-4(n )]TJ /TT1 1 Tf 0.0039 Tc 0 Tw 0 -1.754 TD (1.)Tj /TT2 1 Tf 0 Tc 0.756 0 Td ( )Tj /TT1 1 Tf -0.0004 Tc 0.0024 Tw 0.594 0 Td [(Fa)-4(ilu)-4(re Mo)-4(d)-4(e/Lo)-4(ca)-4(tio)-4(n)-4( Id)-4(en)-4(tifica)-4(tio)-4(n)-4( )]TJ /TT0 1 Tf -0.0005 Tc 0.3864 Tw 0.09 -1.27 Td [(In)-4( o)-4(r)-3(d)-4(e)-1(r to)-4( v)-4(a)-1(lid)-4(ate th)-4(e failu)-4(re m)9(o)-4(d)-4(e)-1(/lo)-4(catio)-4(n)-4( )6(o)-4(f)-3( )6(th)-4(e )]TJ 0.0026 Tc 0.5933 Tw -1.44 -1.168 Td [(package under M)4(S)1(L-3, 70hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 456.849 175.3092 Tm (o)Tj 0.0022 Tc 0.5877 Tw 9.701 0 0 9.7194 459.9918 170.9442 Tm [(C/)4(60%RH and 45hrs-)]TJ 0.0039 Tc 0 Tw -15.172 -1.168 Td (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 163.9602 Tm (o)Tj 0.0008 Tc 0.2891 Tw 9.701 0 0 9.7194 325.7244 159.5952 Tm (C/60%RH, the failure analyses)Tj 0.0024 Tc 0.2815 Tw [( were conduct)4(e)2(d on t)4(h)-1(e )]TJ 0.5094 Tw -1.331 -1.168 Td [(fai)4(l)4(e)2(d sam)12(p)-1(l)4(e)2(s. As shown i)4(n)-1( Fi)4(gs. 8, 9 and )6(10, )6(t)4(h)-1(e )]TJ 0.2995 Tw 0 -1.168 TD [(cracki)4(ng/)4(del)4(a)2(m)12(i)4(nat)4(i)4(on occurred i)4(n)-1(si)4(de t)4(h)-1(e bot)4(t)4(o)-2(m)12( fi)4(l)4(m)12( )6(for )]TJ 0.0019 Tc 0.0001 Tw T* [(t)4(h)-2(ese t)4(h)-2(ree condi)4(t)4(i)4(ons, i)4(.e., cohesi)4(ve del)4(a)2(m)12(i)4(nat)4(i)4(on. )]TJ 0 Tc 0 Tw 1.44 -1.27 Td ( )Tj 0 -1.27 TD ( )Tj T* ( )Tj ET q 245.339386 0 0 54.0677948 312.8039703 274.2492218 cm /Im2 Do Q q 245.3393555 0 0 53.8350067 312.8039703 353.9250183 cm /Im3 Do Q q 245.3860931 0 0 54.0677948 312.8039703 433.4262238 cm /Im4 Do Q q 53.311203 0 0 65.6495972 403.2467499 488.4252014 cm /Im5 Do Q q 245.339386 0 0 53.6022034 55.7927856 404.093399 cm /Im6 Do Q q 245.3860931 0 0 53.7185974 55.7927856 483.3617706 cm /Im7 Do Q q 245.3393555 0 0 54.2424011 55.7927856 562.7465973 cm /Im8 Do Q q 56.5704041 0 0 73.2737885 153.5687561 617.9783936 cm /Im9 Do Q Q BT /GS1 gs /TT4 1 Tf 10 0 0 10 298.5 40.29 Tm (910)Tj /TT5 1 Tf 2.704 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 57 0 obj <>stream Adobed     $$''$$53335;;;;;;;;;;  %% ## ((%%((22022;;;;;;;;;;"? 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\(a\) )]TJ 0 Tc 0 Tw 0 -1.27 TD ( )Tj T* ( )Tj /TT1 1 Tf 0.0039 Tc 26.493 66.946 Td (2.)Tj /TT2 1 Tf 0 Tc 0.756 0 Td ( )Tj /TT1 1 Tf 0.0028 Tc -0.0008 Tw 0.594 0 Td [(Det)5(e)3(rmi)5(nat)5(i)5(on of)5( Equi)5(val)5(e)3(nt)5( Fai)5(l)5(u)-1(re rat)5(e)3( )]TJ /TT0 1 Tf 0.0026 Tc 0.1494 Tw 0.09 -1.27 Td [(It)5( )-6(i)5(s)2( )-6(deri)5(ved from)13( t)5(h)-1(e FEA t)5(h)-1(at)5( 70hrs-60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 494.2134 717.0348 Tm (o)Tj 0.0021 Tc 0.1499 Tw 9.701 0 0 9.7194 497.3562 712.6698 Tm [(C/)4(60%RH and )]TJ 0.0033 Tc 0 Tw -19.024 -1.168 Td (45hrs-85)Tj 0 Tc 6.2736 0 0 6.2856 347.5494 705.6858 Tm (o)Tj 0.0017 Tc 0.0543 Tw 9.701 0 0 9.7194 350.6922 701.3208 Tm [(C/)4(60%RH )6(are equi)4(val)4(e)2(nt)4( t)4(o)-2( t)4(h)-2(e M)3(SL-3. To val)4(i)4(d)-2(at)4(e )]TJ -0.0001 Tc 0.722 Tw -3.906 -1.168 Td [(th)-4(e )-6(m)10(o)-4(d)-4(elin)-4(g)-4( resu)-4(lts, th)-4(e m)10(o)-4(istu)-4(re/reflo)-4(w)-4( tests w)-4(ere )]TJ 0.0018 Tc 0.2162 Tw 0 -1.168 TD [(perform)12(ed with the )]TJ 0.001 Tc 0.2169 Tw 8.585 0 Td [(stacked-die CSP test vehicle )6(under )6(the )]TJ 0.0029 Tc 0.371 Tw -8.585 -1.168 Td [(condi)5(t)5(i)5(ons )-6(of )-6(M)4(S)1(L-3 and 30hrs-, 45hrs-, 60hrs-, 75hrs-, )]TJ 0.0033 Tc 0 Tw T* (88hrs-60)Tj 0 Tc 6.2736 0 0 6.2856 347.5494 660.2898 Tm (o)Tj 0.0026 Tc 0.1314 Tw 9.701 0 0 9.7194 350.6922 655.9248 Tm [(C/)5(60%RH and 30hrs-, 45hrs-, 60hrs-85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 509.7527 660.2898 Tm (o)Tj 0.0013 Tc 9.701 0 0 9.7194 512.8956 655.9248 Tm [(C/60)-3(%RH. )]TJ 0.0002 Tc 0.1338 Tw -20.626 -1.168 Td [(A)-4(f)-3(ter th)-4(e m)10(o)-4(istu)-4(re/reflo)-4(w)-4( tests, th)-4(e TSA)-4(M)2( )-6(w)-4(as )-6(u)-4(s)-1(ed)-4( )-6(fo)-4(r )-6(th)-4(e )]TJ -0.0001 Tc 0.0921 Tw T* [(fin)-4(al )6(in)-4(sp)-4(ectio)-4(n)-4( )6(to)-4( )6(d)-4(eterm)10(in)-4(e )6(th)-4(e failu)-4(re rate. Th)-4(e failu)-4(re rate )]TJ 0.0022 Tc -0.0002 Tw T* [(i)4(s)1( defi)4(ned as )]TJ /TT1 1 Tf 0 Tc 0 Tw 0 -1.27 TD (R)Tj /TT0 1 Tf 0.0007 Tc 0.0013 Tw 0.612 0 Td ( = )Tj /TT1 1 Tf 0 Tc 0 Tw 1.068 0 Td (n)Tj 0.0005 Tc 6.2736 0 0 6.2856 333.9888 608.0844 Tm (f )Tj /TT0 1 Tf -0.0019 Tc 9.701 0 0 9.7194 337.3062 609.5394 Tm (/ )Tj /TT1 1 Tf 0 Tc 0.528 0 Td (n)Tj 6.2736 0 0 6.2856 347.3166 608.0844 Tm (t)Tj /TT0 1 Tf 0.0024 Tc -0.0004 Tw 9.701 0 0 9.7194 349.0626 609.5394 Tm [( )-3210( )-3348( )-3348( )-3348( )-3348( \(4\) )]TJ 0.0018 Tc 0 Tw -3.738 -1.27 Td (where )Tj /TT1 1 Tf 0 Tc 2.742 0 Td (R)Tj /TT0 1 Tf 0.0001 Tc 0.0379 Tw 0.612 0 Td [( is th)-4(e )-6(failu)-4(re )-6(rate, )]TJ /TT1 1 Tf 0 Tc 0 Tw 7.715 0 Td (n)Tj 6.2736 0 0 6.2856 425.0718 595.746 Tm (f)Tj /TT0 1 Tf 0.0001 Tc 0.0439 Tw 9.701 0 0 9.7194 426.8178 597.201 Tm [( is th)-4(e n)-4(u)-4(m)10(b)-4(er o)-4(f)-3( failed)-4( sam)10(p)-4(les, )]TJ 0.003 Tc 0 Tw -11.753 -1.168 Td (and )Tj /TT1 1 Tf 0 Tc 1.704 0 Td (n)Tj 6.2736 0 0 6.2856 334.2216 584.397 Tm (t)Tj /TT0 1 Tf 0.002 Tw 9.701 0 0 9.7194 335.9676 585.852 Tm [( is th)-4(e n)-4(u)-4(m)10(b)-4(er o)-4(f)-3( to)-4(tal sam)10(p)-4(les. )]TJ 0.0016 Tc 0.0544 Tw -0.948 -1.27 Td [(The )6(failure )6(rate under the condition of MSL-3 is 4.6%, as )]TJ 0.0017 Tc 0.1683 Tw -1.44 -1.168 Td [(shown in Fig. 11. The failure rates under the conditions )6(of )]TJ 0.0039 Tc 0 Tw 0 -1.168 TD (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 555.1806 Tm (o)Tj 0.0023 Tc 0.1257 Tw 9.701 0 0 9.7194 325.7244 550.8156 Tm [(C/)4(60%RH but)4( di)4(fferent)4( t)4(i)4(m)12(es are al)4(so pl)4(ot)4(t)4(e)2(d i)4(n)-2( Fi)4(g. 11, )]TJ 0.0004 Tc 0.0016 Tw -1.332 -1.168 Td [(th)-3(ey can)-3( b)-3(e cu)-3(rv)-3(e-fitted)-3( as )]TJ /C2_0 1 Tf 0 Tc 0 Tw 11.6119 0 0 11.6339 314.55 503.0916 Tm <00AF>Tj 0 0.845 TD <00AE>Tj T* <00AD>Tj 9.6764 0 0 9.6949 408.252 505.7106 Tm <0021>Tj -8.114 0 Td <0020>Tj 3.783 1.861 Td [<001F>4331<0020>]TJ 6.7735 0 0 6.7862 364.5438 510.0756 Tm <0010>Tj /TT0 1 Tf 9.6764 0 0 9.6949 416.1672 505.7106 Tm [(57.2)3404( )972(if)1567( )]TJ -8.192 0 Td (10)Tj 5.118 1.861 Td [(2)753(.)1248(57)2642( )972(if)1567( )1451(0)]TJ 6.7735 0 0 6.7862 380.9562 510.0756 Tm [(\))892(2)749(.)1255(57)2418(\()1381(05)1249(.)748(0)]TJ /TT1 1 Tf 9.6764 0 0 9.6949 402.0828 505.7106 Tm (t)Tj -8.408 0 Td (R)Tj 4.102 1.861 Td [(t)4380(R)]TJ 6.7735 0 0 6.7862 361.692 510.0756 Tm (t)Tj /TT0 1 Tf 0.0031 Tc -0.0005 Tw 9.6764 0 0 9.6949 435.024 514.9644 Tm [( )-1552( )-3356( )-3356( \(5\) )]TJ 0.003 Tc 0 Tw -12.631 -2.647 Td (where )Tj /TT1 1 Tf 0 Tc 2.815 0 Td (t)Tj /TT0 1 Tf 0.0029 Tc 0.108 Tw 0.277 0 Td [( )6(i)4(s)1( )6(t)4(h)-2(e )6(soak t)4(i)4(m)11(e. By)4( equal)4(i)4(ng t)4(h)-2(e fai)4(l)4(u)-2(re rat)4(e)2(s under )]TJ 0.0052 Tc 0 Tw -3.092 -1.171 Td (30)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 482.3142 Tm (o)Tj 0.0037 Tc 0.6184 Tw 9.6764 0 0 9.6949 325.7244 477.9492 Tm [(C/)5(60%RH and 60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 406.9716 482.3142 Tm (o)Tj 0.003 Tc 0.6191 Tw 9.6764 0 0 9.6949 410.1144 477.9492 Tm [(C/)4(60%RH, t)4(h)-2(e soak t)4(i)4(m)11(e )6(under )]TJ 0.0052 Tc 0 Tw -10.056 -1.171 Td (60)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 470.9652 Tm (o)Tj 0.0033 Tc 0.0354 Tw 9.6764 0 0 9.6949 325.7244 466.6002 Tm [(C/)5(60%RH can be det)5(e)2(rm)11(i)5(n)-2(ed as 68.3hrs t)5(o)-2( be )-6(equi)5(val)5(e)2(ncy)4( )]TJ 0.0032 Tc 0.1257 Tw -1.335 -1.171 Td [(wi)4(t)4(h)-2( )6(MSL-3. )6(Si)4(m)11(i)4(l)4(a)2(rl)4(y)4(,)1( t)4(h)-2(e fai)4(l)4(u)-2(re rat)4(e)2(s under 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 512.1971 459.6162 Tm (o)Tj 0.0027 Tc 9.6764 0 0 9.6949 515.3399 455.2512 Tm (C/60%RH )Tj 0.0034 Tc 0.1015 Tw -20.931 -1.171 Td [(but)5( di)5(fferent)5( t)5(i)5(m)11(es are pl)5(ot)5(t)5(e)2(d i)5(n)-2( Fi)5(g. 11, t)5(h)-2(ey)4( can be curve-)]TJ 0.0009 Tc 0.0017 Tw 0 -1.171 TD [(fitted)-4( as )]TJ /C2_0 1 Tf 0 Tc 0 Tw 11.5933 0 0 11.6155 314.55 396.2364 Tm <00AF>Tj 0 0.847 TD <00AE>Tj 0 0.842 TD <00AD>Tj 9.6612 0 0 9.6794 403.014 398.8554 Tm <0021>Tj -7.59 0 Td <0020>Tj 3.789 1.864 Td [<001F>4337<0020>]TJ 6.7627 0 0 6.7755 364.4856 403.1622 Tm <0010>Tj /TT0 1 Tf 9.6612 0 0 9.6794 410.9874 398.8554 Tm [(36)2657( )973(if)1569( )]TJ -7.675 0 Td (10)Tj 3.868 1.864 Td [(36)2639( )973(if)1569( )1452(0)]TJ 6.7627 0 0 6.7755 375.7764 403.1622 Tm [(\))1392(36)2420(\()1383(05)1250(.)749(0)]TJ /TT1 1 Tf 9.6612 0 0 9.6794 396.9612 398.8554 Tm (t)Tj -7.892 0 Td (R)Tj 4.102 1.864 Td [(t)4380(R)]TJ 6.7627 0 0 6.7755 361.5756 403.1622 Tm (t)Tj /TT0 1 Tf 0.0035 Tc -0.0005 Tw 9.6612 0 0 9.6794 422.3946 408.051 Tm [( )-2861( )-3361( )-3361( \(6\) )]TJ 0.0039 Tc 0.5292 Tw -11.343 -2.652 Td [(By)4( equal)5(i)5(ng t)5(h)-2(e fai)5(l)5(u)-2(re rat)5(e)2(s under 30)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 490.6049 386.7498 Tm (o)Tj 0.0044 Tc 0.5227 Tw 9.6612 0 0 9.6794 493.7477 382.3848 Tm [(C/)5(60%RH and )]TJ 0.006 Tc 0 Tw -18.729 -1.173 Td (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 375.4008 Tm (o)Tj 0.0039 Tc 0.3666 Tw 9.6612 0 0 9.6794 325.7244 371.0358 Tm [(C/)5(60%RH, t)5(h)-2(e soak t)5(i)5(m)11(e under 85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 477.51 375.4008 Tm (o)Tj 0.0038 Tc 0.3667 Tw 9.6612 0 0 9.6794 480.6528 371.0358 Tm [(C/)5(60%RH can be )]TJ 0.0041 Tc 0.3001 Tw -17.373 -1.173 Td [(det)5(e)2(rm)11(i)5(n)-2(ed )-6(as 47hrs t)5(o)-2( be equi)5(val)5(e)2(ncy)4( wi)5(t)5(h)-2( MSL-3. The )]TJ 0.001 Tc 0.7731 Tw 0 -1.173 TD [(ex)-5(p)-5(e)-1(rim)8(e)-1(n)-5(t)2(al m)8(o)-5(istu)-5(re/reflo)-5(w)-6( tests v)-5(a)-1(lid)-5(ated)-5( th)-5(e )6(n)-5(e)-1(w)-6( )]TJ 0.0046 Tc -0.0016 Tw T* [(m)11(e)3(t)5(hodol)5(ogy)5( and m)11(odel)5(i)5(ng anal)5(y)5(s)2(es. )]TJ 0 Tc 0 Tw 0 -1.275 TD ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 315.12 174.42 246.18 142.68 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 346.92 190.98 148.5 0.12 re W n 1 0 0 1 346.919978 191.0999843 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 206.28 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 346.92 220.44 148.5 0.12 re W n 1 0 0 1 346.919978 220.5599811 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 206.28 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 346.92 279.36 206.28 0.12 re W n 1 0 0 1 346.919978 279.4799748 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 206.28 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 346.92 308.88 206.28 0.06 re W n 1 0 0 1 346.919978 308.9399717 cm 0 0 0 RG 0.06 w [2.88 2.88 2.88 2.88 2.88 2.88 2.88 2.88]0 d 0 0 m 206.28 0 l S Q q 0.9700012 0 0 0.9700012 345.5128021 311.6721497 cm 0.5 0.5 0.5 RG 0.388 w 1 j 1 J 0 0 m 206.28 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 552.9 229.86 0.66 79.38 re W n 1 0 0 1 553.1999528 308.9399717 cm 0.5 0.5 0.5 RG 0.388 w 1 j 1 J 0 0 m 0 -117.84 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 346.68 190.74 148.74 0.6 re W n 1 0 0 1 553.1999528 191.0999843 cm 0.5 0.5 0.5 RG 0.388 w 1 j 1 J 0 0 m -206.28 0 l S Q q 0.9700012 0 0 0.9700012 345.5128021 197.367218 cm 0.5 0.5 0.5 RG 0.388 w 1 j 1 J 0 0 m 0 117.84 l S Q q 0.9700012 0 0 0.9700012 345.5128021 311.6721497 cm 0 0 0 RG 0.06 w 1 j 1 J 0 0 m 0 -117.84 l -3.12 -117.84 m 0 -117.84 l -3.12 -88.38 m 0 -88.38 l -3.12 -58.92 m 0 -58.92 l -3.12 -29.46 m 0 -29.46 l -3.12 0 m 0 0 l 0 -58.92 m 206.28 -58.92 l 0 -61.98 m 0 -58.92 l 41.1 -61.98 m 41.1 -58.92 l 82.56 -61.98 m 82.56 -58.92 l 123.66 -61.98 m 123.66 -58.92 l 165.18 -61.98 m 165.18 -58.92 l 206.28 -61.98 m 206.28 -58.92 l S Q q 0.9700012 0 0 0.9700012 369.5494232 219.1922455 cm 0 0 1 RG 0.388 w 1 j 1 J 0 0 m 3.12 3.9 l 6.24 7.74 l 9.3 11.64 l 12.42 16.26 l 15.54 21.72 l 18.6 27.9 l 21.72 34.14 l 24.84 40.32 l 31.02 51.54 l 37.26 62.04 l 42.66 72.12 l 47.7 81.78 l S Q q 0.9700012 0 0 0.9700012 369.5494232 245.9060822 cm 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 12.42 22.08 l 24.84 44.16 l S Q q 0.9700012 0 0 0.9700012 520.404007 270.524704 cm 1 0 0 rg 1 0 0 RG 0.388 w 1 j 1 J 0 0 m 0 1.2 -0.96 2.1 -2.16 2.1 c -3.36 2.1 -4.32 1.2 -4.32 0 c -4.32 -1.2 -3.36 -2.16 -2.16 -2.16 c -0.96 -2.16 0 -1.2 0 0 c h B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 369.42 215.94 4.26 -4.26 re B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 381.78 232.2 4.26 -4.26 re B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 394.2 256.26 4.26 -4.26 re B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 406.62 277.98 4.26 -4.32 re B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 417.06 297.72 4.26 -4.26 re B* Q q 0.9700012 0 0 0.9700012 369.5494232 248.1176758 cm 1 0.398 0 rg 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 2.34 -2.28 l 0 -4.62 l -2.28 -2.28 l 0 0 l h B* Q q 0.9700012 0 0 0.9700012 381.5968323 269.5935059 cm 1 0.398 0 rg 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 2.34 -2.34 l 0 -4.68 l -2.34 -2.34 l 0 0 l h B* Q q 0.9700012 0 0 0.9700012 393.6442566 291.0111237 cm 1 0.398 0 rg 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 2.34 -2.34 l 0 -4.62 l -2.34 -2.34 l 0 0 l h B* Q BT /TT0 1 Tf 0.0029 Tc 9.026 0 0 9.0253 322.5816 193.7587 Tm [(0.)8(01)]TJ -0.001 Tc 0.503 3.166 Td (0.1)Tj 0 Tc 0.748 3.166 Td (1)Tj 0.0029 Tc -0.503 3.166 Td (10)Tj -0.0035 Tc -0.496 3.173 Td [(10)-6(0)]TJ 0.0029 Tc 2.038 -7.88 Td [(0)-3669(5)6(0)-3205(10)6(0)-2915(15)6(0)-2960(2)6(00)-2915(2)6(50)]TJ -0.0285 Tc 0.0235 Tw 9.253 -5.623 Td [(Tim)-5(e)-42( \()-31(h)-31(r)-24(s)-20(\))]TJ 0.0126 Tc -0.0111 Tw 0 9.026 -9.0253 0 325.1424 224.43 Tm [(F)27(a)-1(ilu)10(r)10(e)-1( R)15(a)-1(te \()10(%)14(\))]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 0 0 0 RG 0.06 w 1 j 1 J 495.42 229.86 58.14 -39.12 re B* Q q 0.9700012 0 0 0.9700012 502.3037872 228.0386505 cm 1 0 0 rg 1 0 0 RG 0.388 w 1 j 1 J 0 0 m 0 1.14 -0.9 2.1 -2.1 2.1 c -3.3 2.1 -4.26 1.14 -4.26 0 c -4.26 -1.2 -3.3 -2.16 -2.1 -2.16 c -0.9 -2.16 0 -1.2 0 0 c h B* Q BT /TT0 1 Tf 0.0029 Tc 0 Tw 9.026 0 0 9.0253 508.7634 224.6047 Tm [(3)6(0C)6(/)-9(60%)]TJ ET q 0.9700012 0 0 0.9700012 494.4467773 215.4092407 cm 0 0 1 RG 0.388 w 1 j 1 J 0 0 m 12.36 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 1 rg 0 0 1 RG 0.388 w 1 j 1 J 504.3 212.04 4.26 -4.26 re B* Q BT /TT0 1 Tf 9.026 0 0 9.0253 508.7634 212.2081 Tm [(6)6(0C)6(/)-9(60%)]TJ ET q 0.9700012 0 0 0.9700012 494.4467773 203.012619 cm 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 12.36 0 l S Q q 0.9700012 0 0 0.9700012 500.4413757 205.2824249 cm 1 0.398 0 rg 1 0.398 0 RG 0.388 w 1 j 1 J 0 0 m 2.34 -2.34 l 0 -4.68 l -2.34 -2.34 l 0 0 l h B* Q BT /TT0 1 Tf 9.026 0 0 9.0253 508.7634 199.8115 Tm [(8)6(5C)6(/)-9(60%)]TJ 0 Tc 9.6612 0 0 9.6794 555.4398 179.616 Tm ( )Tj 0.0042 Tc -0.0012 Tw -25.114 -1.046 Td [(Fi)5(g. 11:)5( Fai)5(l)5(u)-2(re rat)5(e)2(s under 30)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 430.7754 173.8542 Tm (o)Tj 0.0042 Tc -0.0012 Tw 9.6612 0 0 9.6794 433.9182 169.4892 Tm [(C/)5(60%RH, 60)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 489.0917 173.8542 Tm (o)Tj 0.0043 Tc -0.0013 Tw 9.6612 0 0 9.6794 492.2345 169.4892 Tm [(C/)5(60%RH and )]TJ 0.006 Tc 0 Tw -18.572 -1.173 Td (85)Tj 0 Tc 6.2736 0 0 6.2856 322.5816 162.5052 Tm (o)Tj 0.0037 Tc 9.6612 0 0 9.6794 325.7244 158.1402 Tm (C/60%RH )Tj 0.004 Tc 0.2038 Tw 0.018 -1.876 Td [(W)-10(i)5(t)5(h)-2( t)5(h)-2(e anal)5(y)4(s)2(es of m)11(odel)5(i)5(ng )6(resul)5(t)5(s)2( )6(and )6(experi)5(m)11(e)2(nt)5(al)5( )]TJ 0.258 Tw -1.355 -1.173 Td [(val)5(i)5(d)-2(at)5(i)5(on, i)5(t)5( i)5(s)2( t)5(h)-2(erefore concl)5(uded t)5(h)-2(at)5( t)5(h)-2(e condi)5(t)5(i)5(ons of )]TJ 0.0051 Tc 0 Tw 0 -1.173 TD (70hrs-60)Tj 0 Tc 6.2736 0 0 6.2856 347.5494 121.6488 Tm (o)Tj 0.0046 Tc 0.1791 Tw 9.6612 0 0 9.6794 350.6922 117.2838 Tm [(C/)5(60%RH 45hrs-85)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 430.1352 121.6488 Tm (o)Tj 0.0042 Tc 0.1735 Tw 9.6612 0 0 9.6794 433.278 117.2838 Tm [(C/)5(60%RH are equi)5(val)5(e)2(nt)5( wi)5(t)5(h)-2( )]TJ 0.0047 Tc 0.2393 Tw -12.47 -1.173 Td [(MSL-3 )-6(i)5(n)-1( )-6(t)5(e)3(rm)12(s of gl)5(obal)5( m)11(o)-1(i)5(s)2(t)5(u)-1(re di)5(st)5(ri)5(but)5(i)5(on and vapor )]TJ 0.004 Tc 0.4207 Tw T* [(pressure, )-6(l)5(o)-2(cal)5( )-6(m)11(o)-2(i)5(s)2(t)5(u)-2(re di)5(st)5(ri)5(but)5(i)5(on and vapor pressure, )]TJ 0.0016 Tc 0.0014 Tw T* [(failu)-4(re rate, failu)-4(re lo)-4(catio)-4(n)-4( an)-4(d)-4( failu)-4(re m)8(o)-4(d)-4(e. )]TJ 0 Tc 0 Tw 1.355 -1.876 Td ( )Tj ET q 113.6063995 0 0 90.8501892 120.4529877 359.0466156 cm /Im0 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.203 0.801 RG 0.75 w 8 M 1 J 232.38 451.86 -117.9 -94.44 re 114.48 451.86 m h S Q q 237.688797 0 0 34.2216034 58.3535919 477.1344147 cm /Im1 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.203 0.801 RG 0.75 w 8 M 1 J 296.34 515.22 -245.88 -36.06 re 50.46 515.22 m h S Q q 110.7368164 0 0 88.5804138 120.1037903 144.8706207 cm /Im2 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.203 0.801 RG 0.75 w 8 M 1 J 228.96 228.72 -114.84 -92.1 re 114.12 228.72 m h S Q q 238.8408051 0 0 36.0839996 56.5493927 260.6304474 cm /Im3 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.203 0.801 RG 0.75 w 8 M 1 J 295.44 293.94 -246.84 -37.98 re 48.6 293.94 m h S Q q 239.3765717 0 0 42.078598 55.7927856 692.0669861 cm /Im4 Do Q q 239.3765869 0 0 93.4691925 55.7927856 572.8733978 cm /Im5 Do Q q 0.9700012 0 0 0.9700012 546.6522369 269.8845062 cm 0.004 0.004 1 RG 1 j [8 3 1 3]0 d 0 0 m -210 0 l S Q q 0.9700012 0 0 0.9700012 369.6076202 254.3450928 cm 0.004 0.004 0.004 RG 0.75 w 1 j 1 J [2.25 3]0 d 0 0 m 0 -36 l 12.3 11.04 m 12.3 -17.76 l 24.66 33 m 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FEA m)11(odel)5(i)5(ng appr)]TJ 0.0042 Tc 0.1133 Tw 13.759 0 Td [(oaches )6(were devel)5(oped and )]TJ 0.0044 Tc 0.0769 Tw -13.759 -1.173 Td [(appl)5(i)5(e)3(d for m)11(o)-2(i)5(s)2(t)5(u)-2(re di)5(ffusi)5(on and vapor pressure anal)5(y)4(s)2(i)5(s)2( )-6(of )]TJ 0.0036 Tc 0.4874 Tw T* [(the )-6(package under various )]TJ 0.0037 Tc 12.771 0 Td (conditions of 30\260C/60%RH, )Tj 0.0046 Tc 1.0827 Tw -12.771 -1.173 Td [(60\260C/)5(60%RH and 85\260C/)5(60%RH. At)5( )6(70hrs )6(under )]TJ 0.0043 Tc 0.1312 Tw T* [(60\260C/)5(60%RH and 45hrs under 85\260C/)5(60%RH, bot)5(h t)5(h)-2(e )-6(l)5(o)-2(cal)5( )]TJ 0.0025 Tc 0.5608 Tw T* [(m)9(o)-3(isture )-6(concentration at critical interface and overall )]TJ 0.0044 Tc 0.1733 Tw T* [(m)11(o)-2(i)5(s)2(t)5(u)-2(re di)5(st)5(ri)5(but)5(i)5(on of packag)]TJ 0.0026 Tc 0.1751 Tw [(e becom)9(e)1( identi)]TJ 0.0001 Tc 0.1716 Tw [(cal w)-7(ith)-6( th)-6(at )]TJ 0.0045 Tc 0.0648 Tw T* [(under MSL-3, i)5(ndi)5(cat)5(i)5(ng t)5(h)-1(at)5( 70hrs-60\260C/)5(60%RH )-6(and )-6(45hrs-)]TJ 0.004 Tc 0.0833 Tw T* [(85\260C/)5(60%RH )6(i)5(s)2( )6(t)5(h)-2(e equi)5(val)5(e)2(nt)5( soak t)5(i)5(m)11(e com)11(p)-2(ared t)5(o)-2( MSL-)]TJ 0.0042 Tc 0.041 Tw T* [(3. Such equi)5(val)5(e)2(nci)5(e)2(s of t)5(h)-2(e t)5(e)2(st)5( condi)5(t)5(i)5(ons are )-6(proven )-6(by)4( )-6(t)5(h)-2(e )]TJ 0.0037 Tc 0.3668 Tw T* [(corresponding m)10(o)-2(isture/reflow )]TJ 0.0026 Tc 0.3619 Tw 13.434 0 Td [(sensitivity experim)9(e)1(nts and )]TJ 0.0021 Tc 0.4045 Tw -13.434 -1.173 Td (the failure analyses, indicati)Tj 0.0023 Tc 0.4043 Tw 12.494 0 Td [(ng that the )6(accelerated )6(tests )]TJ 0.0044 Tc 0.4564 Tw -12.494 -1.173 Td [(correl)5(a)3(t)5(e)3(d wel)5(l)5( wi)5(t)5(h)-2( t)5(h)-2(e MSL-3 )6(t)5(e)3(st)5(. )6(The )6(m)11(e)3(t)5(hodol)5(ogy)4( )]TJ 0.0042 Tc -0.0012 Tw T* [(devel)5(oped i)5(n)-2( t)5(h)-2(i)5(s)2( work can be ext)5(e)2(nded t)5(o)-2( ot)5(her packages. )]TJ /TT0 1 Tf 0.0009 Tc 0 Tw 9.701 0 0 9.7194 55.7928 468.288 Tm (References)Tj /TT1 1 Tf 0 Tc 9.6612 0 0 9.6794 101.1306 468.288 Tm ( )Tj 0.006 Tc -4.693 -1.263 Td (1.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 456.066 Tm ( )Tj /TT1 1 Tf 0.0032 Tc 0.1564 Tw 9.6612 0 0 9.6794 69.5862 456.066 Tm [(B. )-6(Xie )-6(and )-6(X. )-6(Shi, and X.J. Fan, \223Accelerated m)10(o)-3(isture )]TJ 0.0022 Tc 0.5731 Tw T* [(sensitivity test m)9(ethodology )]TJ 0.0033 Tc 0.572 Tw 13.301 0 Td [(for stacked-die m)10(o)-3(lded )]TJ 0.0034 Tc 0.7165 Tw -13.301 -1.173 Td [(m)10(a)2(trix array package\224, Proceedings of )6(IEEE )6(9th )]TJ 0.0043 Tc 0.4144 Tw T* [(El)5(ect)5(roni)5(cs )-6(Packagi)5(ng Technol)5(ogy)4( Conference, p.100-)]TJ 0.0045 Tc -0.0015 Tw T* [(104, Decem)11(ber 2007 )]TJ 0.006 Tc 0 Tw -1.428 -1.275 Td (2.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 398.3316 Tm ( )Tj /TT1 1 Tf 0.0042 Tc 0.4386 Tw 9.6612 0 0 9.6794 69.5862 398.3316 Tm [(Joi)5(n)-2(t)5( Indust)5(ry)4( St)5(andard J-STD-020, )6(\223Moi)5(st)5(ure/)5(Refl)5(ow )]TJ 0.0013 Tc 0.3873 Tw T* [(Sen)-5(s)-1(itiv)-5(ity Classificatio)-5(n)-5( fo)-5(r Plastic )6(In)-5(teg)-5(r)-3(ated)-5( )6(Circu)-5(it )]TJ 0.0031 Tc 0.7589 Tw T* [(Surface )-6(Mount Devices\224, IPC \(The Institute for )]TJ 0.0042 Tc 0.2759 Tw T* [(Int)5(e)2(rconnect)5(i)5(ng and Packagi)5(ng El)5(ect)5(roni)5(c )6(Ci)5(rcui)5(t)5(s)2(\) )6(and )]TJ 0.4386 Tw T* [(JEDEC \(Joi)5(nt)5( El)5(ect)5(ron Devi)5(ce )6(Engi)5(neeri)5(ng )6(Counci)5(l)5(\), )]TJ 0.0054 Tc 0 Tw T* (2004. )Tj 0.006 Tc -1.428 -1.275 Td (3.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 329.2482 Tm ( )Tj /TT1 1 Tf 0.004 Tc 0.0713 Tw 9.6612 0 0 9.6794 69.5862 329.2482 Tm [(R. Shook, T. Conrad, V. Sast)5(ry)4( and D. St)5(eel)5(e, \223Di)5(ffusi)5(on )]TJ 0.0028 Tc 0.1508 Tw T* [(Model )6(to Derate Moisture Sensitive Surface Mount IC\222s )]TJ 0.004 Tc 0.5352 Tw T* [(for Fact)5(ory)4( Use Condi)5(t)5(i)5(ons\224, )]TJ /TT3 1 Tf 0.529 Tw 14.096 0 Td (IEEE Transaction on )Tj 0.005 Tc 0.1426 Tw -14.096 -1.173 Td [(Component)6(s, Packagi)6(ng and Manuf)6(act)6(u)-1(ri)6(ng )-6(Technol)6(ogy)]TJ /TT1 1 Tf 0.003 Tc 0 Tw 23.476 0 Td (, )Tj 0.0049 Tc -0.0019 Tw -23.476 -1.173 Td [(Vol)6(.)2( 19, No. 2, pp. 110-118, 1996. )]TJ 0.006 Tc 0 Tw -1.428 -1.275 Td (4.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 271.5138 Tm ( )Tj /TT1 1 Tf 0.0039 Tc 0.3786 Tw 9.6612 0 0 9.6794 69.5862 271.5138 Tm [(R. Shook, R. Vaccaro and D. Gerlach, \223Method )6(for )]TJ 0.0029 Tc 0.97 Tw T* (Equivalent Acceleration )Tj 0.0031 Tc 0.9698 Tw 11.946 0 Td (of JEDEC/IPC Moisture )Tj 0.0009 Tc 0.6587 Tw -11.946 -1.173 Td [(Sen)-5(s)-1(itiv)-5(ity Lev)-5(e)-1(ls\224, )]TJ /TT3 1 Tf 0.0028 Tc 0.6568 Tw 9.494 0 Td (Annual International Reliability )Tj 0.004 Tc -0.001 Tw -9.494 -1.173 Td [(Physi)5(c)2(s Symposi)5(u)-2(m)]TJ /TT1 1 Tf 0.0049 Tc -0.0019 Tw 7.922 0 Td (, pp. 214-219, 1998. )Tj 0.006 Tc 0 Tw -9.349 -1.275 Td (5.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 225.1284 Tm ( )Tj /TT1 1 Tf 0.0041 Tc 0.1314 Tw 9.6612 0 0 9.6794 69.5862 225.1284 Tm [(S. )6(Li)5(u )6(and )6(Y. )6(H. Mei)5(,)1( \223Behavi)5(o)-2(r of Del)5(a)2(m)11(i)5(nat)5(e)2(d Pl)5(ast)5(i)5(c)2( )]TJ 0.003 Tc 0.753 Tw T* [(IC Packages Subjected )6(to)]TJ 0.0047 Tc 0.7453 Tw 12.524 0 Td [( Encapsul)5(a)3(t)5(i)5(on Cool)5(i)5(ng, )]TJ 0.0045 Tc 0.6853 Tw -12.524 -1.173 Td [(Moi)5(s)2(t)5(u)-1(re Absorpt)5(i)5(on, and W)-9(a)3(ve )6(Sol)5(d)-1(eri)5(ng\224, )]TJ /TT3 1 Tf 0.0037 Tc 0 Tw 21.548 0 Td (IEEE )Tj 0.0048 Tc 1.2633 Tw -21.548 -1.173 Td [(Transact)6(i)6(ons on Component)6(s, Packagi)6(ng, and )]TJ 0.005 Tc -0.002 Tw T* [(Manuf)6(act)6(u)-1(ri)6(ng Technol)6(ogy)]TJ /TT1 1 Tf 0.0044 Tc -0.0014 Tw 11.006 0 Td [(, Part)5( A, Vol)5(.)1( 18, No. 3, 1995. )]TJ 0.006 Tc 0 Tw -12.434 -1.275 Td (6.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 167.394 Tm ( )Tj /TT1 1 Tf 0.0044 Tc 0.2095 Tw 9.6612 0 0 9.6794 69.5862 167.394 Tm [(A. A. O. Tay)4(,)1( and T. )6(Y. )6(Li)5(n, )6(\223Moi)5(st)5(ure )6(Di)5(ffusi)5(on )6(and )]TJ 0.0033 Tc 0.0419 Tw T* [(Heat )6(Transfer in Pl)]TJ 0.0025 Tc 0.0427 Tw 7.813 0 Td (astic IC Packages\224, )Tj /TT3 1 Tf 0.0036 Tc 0.0416 Tw 8.175 0 Td (IEEE Transactions )Tj 0.0051 Tc 1.1304 Tw -15.988 -1.173 Td [(on Component)6(s, Packagi)6(ng and Manuf)6(act)6(u)-1(ri)6(ng )]TJ 0.005 Tc 0 Tw T* [(Technol)6(ogy)]TJ /TT1 1 Tf 0.0036 Tc -0.0006 Tw 4.705 0 Td (, Part A,)Tj /TT3 1 Tf 0 Tc 0 Tw 3.361 0 Td ( )Tj /TT1 1 Tf 0.0049 Tc -0.0019 Tw 0.253 0 Td [(Vol)6(.)2( 19, No. 2, pp.186-193, 1996. )]TJ 0.006 Tc 0 Tw -9.747 -1.275 Td (7.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 63.126 121.0086 Tm ( )Tj /TT1 1 Tf 0.0035 Tc 0.1019 Tw 9.6612 0 0 9.6794 69.5862 121.0086 Tm [(A. )6(A. )6(O. )6(Tay, )6(and T. Y. Lin, \223Influence of Tem)10(p)-2(erature, )]TJ 0.0045 Tc 0.0106 Tw T* [(Hum)11(i)5(di)5(t)5(y)5( )6(and )6(Defect)5( Locat)5(i)5(on on Del)5(a)3(m)11(i)5(nat)5(i)5(on i)5(n)-1( Pl)5(ast)5(i)5(c)3(s )]TJ 0.0031 Tc 0 Tw T* (Packages\224, )Tj /TT3 1 Tf 0.0045 Tc 1.125 Tw 5.831 0 Td [(IEEE )-6(Transact)5(i)5(ons on Component)5(s, )]TJ 0.0051 Tc 0.2509 Tw -5.831 -1.173 Td [(Packagi)6(ng and Manuf)6(act)6(u)-1(ri)6(ng Technol)6(ogy)]TJ /TT1 1 Tf 0.0041 Tc 0.2459 Tw 18.102 0 Td [(, )-6(Part)5( A, 22, )]TJ 0.0049 Tc -0.0019 Tw -18.102 -1.173 Td (no. 4, pp. 512-518, 1999. )Tj 0.006 Tc 0 Tw 25.175 67.09 Td (8.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 320.1372 725.0083 Tm ( )Tj /TT1 1 Tf 0.003 Tc 0.747 Tw 9.6612 0 0 9.6794 326.5974 725.0083 Tm [(X.J. Fan, \223Mechanics of m)10(o)-3(isture )6(for )6(polym)10(ers: )]TJ 0.0043 Tc 0.559 Tw T* [(fundam)11(e)2(nt)5(al)5( concept)5(s)2( and m)11(odel)5( st)5(udy)4(\224, )]TJ /TT3 1 Tf 0.004 Tc 0.5532 Tw 19.452 0 Td (8th IEEE )Tj 0.0047 Tc 0.3598 Tw -19.452 -1.173 Td [(Int)5(e)3(rnat)5(i)5(onal)5( Conf)5(erence on Thermal)5( and Mechani)5(cal)5( )]TJ 0.0044 Tc 0.4745 Tw T* [(Si)5(mul)5(a)-2(t)5(i)5(on and Experi)5(ment)5(s i)5(n)-2( Mi)5(croel)5(ect)5(roni)5(cs and )]TJ 0.0029 Tc 0 Tw T* (Microsystems)Tj /TT1 1 Tf 0.0048 Tc -0.0018 Tw 5.53 0 Td [(, \(EuroSi)6(m)12(E\), Apri)6(l)6( 20-23, 2008 )]TJ 0.006 Tc 0 Tw -6.958 -1.275 Td (9.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 320.1372 667.2738 Tm ( )Tj /TT1 1 Tf 0.0041 Tc 0.0592 Tw 9.6612 0 0 9.6794 326.5974 667.2738 Tm [(T. Y. Tee, C. L. )-6(Kho, )-6(D. )-6(Ya)]TJ 0.0651 Tw 11.759 0 Td [(p, C. Toh, X. Barat)5(on and Z. )]TJ 0.0029 Tc 0.3013 Tw -11.759 -1.173 Td [(W)-11(. Zhong, \223Reliability Assessm)10(ent and )6(Hygroswelling )]TJ 0.0014 Tc 0.9534 Tw T* [(Mo)-5(d)-5(elin)-5(g)-5( o)-5(f)-3( FCBG)-5(A)-5( w)-5(ith)-5( )6(N)-5(o)-5(-flo)-5(w)-5( )6(U)-5(n)-5(d)-5(erfill\224, )]TJ /TT3 1 Tf 0.001 Tc 0.002 Tw T* [(Micro)-5(e)-1(lectro)-5(n)-5(i)2(cs Relia)-5(b)-5(ility)]TJ /TT1 1 Tf 0.0048 Tc -0.0018 Tw 11.301 0 Td (, 43, pp. 741-749, 2003. )Tj 0.006 Tc 0 Tw -12.729 -1.275 Td (10.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 620.8884 Tm ( )Tj /TT1 1 Tf 0.0045 Tc 0.0889 Tw 9.6612 0 0 9.6794 326.5974 620.8884 Tm [(X.Q. Shi)5(,)2( Y.L. Zhang, )-6(W)-9(.)]TJ 0.095 Tw 10.831 0 Td ( Zhou, and X.J. Fan, \223)Tj /TT3 1 Tf 0.0013 Tc 0.0981 Tw 9.428 0 Td (Effect of )Tj 0.0003 Tc 0.9485 Tw -20.259 -1.173 Td [(h)-6(y)-2(g)-6(r)-2(o)-6(t)1(h)-6(e)-2(rm)-6(a)-6(l)1( )-6(a)-6(g)-6(i)1(n)-6(g)-6( o)-6(n)-6( in)-6(terfa)-6(c)-2(ia)-6(l relia)-6(b)-6(ility o)-6(f)1( )]TJ 0.0026 Tc 0.3498 Tw T* (silicon/underfill/FR-4 assembly)Tj /TT1 1 Tf 0.0033 Tc 0.3431 Tw 13.066 0 Td [(\224, )-6(IEEE Transactions of )]TJ 0.0047 Tc 0.5766 Tw -13.066 -1.173 Td [(Com)11(ponent)5(s )-6(and Packagi)5(ng Technol)5(ogi)5(es, 2008 \(i)5(n )]TJ 0.0034 Tc 0 Tw T* (press\). )Tj 0.006 Tc -1.428 -1.275 Td (11.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 563.154 Tm ( )Tj /TT1 1 Tf 0.0043 Tc 0.2216 Tw 9.6612 0 0 9.6794 326.5974 563.154 Tm [(J. Zhou, \223Anal)5(y)4(t)5(i)5(cal)5( and Num)11(e)2(ri)5(cal)5( Bound Anal)5(y)4(s)2(i)5(s)2( )6(of )]TJ 0.0048 Tc 0.9018 Tw T* [(Hy)5(groscopi)6(c Swel)6(l)6(i)6(ng )]TJ 0.0024 Tc 0 Tw (Characterization\224, )Tj /TT3 1 Tf 0.0021 Tc 19.542 0 Td (Electronic )Tj 0.0045 Tc 0.2816 Tw -19.542 -1.173 Td [(Component)5(s and Technol)5(ogy Conf)5(erence)]TJ /TT1 1 Tf 0.0049 Tc 0.2812 Tw 17.512 0 Td (, pp. 734-739, )Tj 0.0054 Tc 0 Tw -17.512 -1.173 Td (2006. )Tj 0.006 Tc -1.428 -1.275 Td (12.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 516.7686 Tm ( )Tj /TT1 1 Tf 0.0039 Tc 0.2401 Tw 9.6612 0 0 9.6794 326.5974 516.7686 Tm [(X.J. Fan, J. Zhou and A. )6(Chandra )6(\223Package )6(St)5(ruct)5(ural)5( )]TJ 0.0012 Tc 0.5741 Tw T* [(In)-5(teg)-5(r)-3(ity A)-5(n)-5(alysis Co)-5(n)-5(s)-1(id)-5(erin)-5(g)-5( Mo)-5(istu)-5(re\224, )]TJ /TT3 1 Tf 0.0021 Tc 0 Tw 19.542 0 Td (Electronic )Tj 0.0044 Tc -0.0014 Tw -19.542 -1.173 Td [(Component)5(s and Technol)5(ogy Conf)5(erence)]TJ /TT1 1 Tf 0.0051 Tc -0.0021 Tw 16.663 0 Td (, 2008 )Tj 0.006 Tc 0 Tw -18.09 -1.275 Td (13.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 481.7322 Tm ( )Tj /TT1 1 Tf 0.0045 Tc 0.0889 Tw 9.6612 0 0 9.6794 326.5974 481.7322 Tm [(G. Q. Zhang, W)-9(.)2( D. V. Dri)5(e)3(l)5(,)2( and X. J. Fan, )-6(\223)]TJ /TT3 1 Tf 0.004 Tc 0 Tw 19.367 0 Td [(Mechani)5(cs )]TJ 0.0037 Tc -0.0007 Tw -19.367 -1.173 Td [(of)4( Mi)4(croel)4(ect)4(roni)4(cs)]TJ /TT1 1 Tf 0.0043 Tc -0.0013 Tw 7.904 0 Td [(\224, Spri)5(nger, 2006. )]TJ 0.006 Tc 0 Tw -9.331 -1.275 Td (14.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 458.0448 Tm ( )Tj /TT1 1 Tf 0.0042 Tc 0.3121 Tw 9.6612 0 0 9.6794 326.5974 458.0448 Tm [(X.J. )-6(Fan, )-6(J. Zhou, G. Q. )]TJ 0.0043 Tc [(Zhang and L. J. Ernst)5(,)1( \223A )]TJ 0.0032 Tc 0.795 Tw T* [(Microm)10(echanics Based Vapor Pressure )6(Model )6(in )]TJ 0.0027 Tc 0.6449 Tw T* (Electronic Packages\224, )Tj /TT3 1 Tf 0.0042 Tc 0.6374 Tw [(ASME Journal)5( of)5( El)5(ect)5(roni)5(c )]TJ 0.0048 Tc 0 Tw T* [(Packagi)6(ng)]TJ /TT1 1 Tf -0.0019 Tw 4.313 0 Td (, 127 \(3\), pp. 262-267, 2005. )Tj 0.006 Tc 0 Tw -5.741 -1.275 Td (15.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 411.6594 Tm ( )Tj /TT1 1 Tf 0.0042 Tc 0.288 Tw 9.6612 0 0 9.6794 326.5974 411.6594 Tm [(X.J. Fan, G. Q. Zhang, W)-10(.)1( )]TJ 0.0018 Tc 0.2843 Tw 12.651 0 Td [(V)-5(.)-1( D)-5(r)-2(iel an)-4(d)-4( L. J. Ern)-4(s)-1(t, )]TJ 0.0041 Tc 0.4989 Tw -12.651 -1.173 Td [(\223Int)5(erfaci)5(al)5( Del)5(a)2(m)11(i)5(nat)5(i)5(on Mechani)5(s)2(m)11(s)2( duri)5(ng Refl)5(ow )]TJ 0.0013 Tc 0.2909 Tw T* [(w)-5(ith)-5( Mo)-5(istu)-5(re Preco)-5(n)-5(d)-5(itio)-5(n)-5(i)2(n)-5(g)-5(\224)-1(, )]TJ /TT3 1 Tf 0.0039 Tc 0.2883 Tw 14.187 0 Td (IEEE Transactions on )Tj 0.0048 Tc 0.5645 Tw -14.187 -1.173 Td [(Component)6(s and Packagi)6(ng Technol)6(ogi)6(es)]TJ /TT1 1 Tf 0 Tc 0 Tw 18.705 0 Td (,)Tj /TT3 1 Tf 0.253 0 Td ( )Tj /TT1 1 Tf 0.0056 Tc 0.5577 Tw 0.813 0 Td [(2008 \(i)6(n )]TJ 0.0034 Tc 0 Tw -19.771 -1.173 Td (press\). )Tj 0.006 Tc -1.428 -1.275 Td (16.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 353.925 Tm ( )Tj /TT1 1 Tf 0.0033 Tc 0.4455 Tw 9.6612 0 0 9.6794 326.5974 353.925 Tm [(X.J. )-6(Fan )-6(and T. B. Lim)10(, \223Mechanism)10( Analysis for )]TJ 0.0017 Tc 0.176 Tw T* [(Mo)-4(istu)-4(re-in)-4(d)-4(u)-4(ced)-4( Failu)-4(re)]TJ 0.0031 Tc 0.1746 Tw [(s in IC )6(packages\224, )]TJ /TT3 1 Tf 0.0053 Tc 0.1664 Tw 18.711 0 Td (ASME 1999 )Tj 0.0046 Tc 1.2815 Tw -18.711 -1.173 Td [(Int)5(e)3(rnat)5(i)5(onal)5( )-6(Mechani)5(cal)5( Engi)5(neeri)5(ng Congress)]TJ /TT1 1 Tf 0.003 Tc 0 Tw 23.476 0 Td (, )Tj 0.0042 Tc -0.0012 Tw -23.476 -1.173 Td [(IMECE/)5(EPE-14, 1999. )]TJ 0.006 Tc 0 Tw -1.428 -1.275 Td (17.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 307.5396 Tm ( )Tj /TT1 1 Tf 0.0011 Tc 0.4236 Tw 9.6612 0 0 9.6794 326.5974 307.5396 Tm [(X)-6(.)-2(J. Fan)-5(,)-2( \223Mo)-5(i)2(stu)-5(r)-3(e Related)-5( Reliab)-5(ility in)-5( Electro)-5(n)-5(i)2(c )]TJ 0.0042 Tc 0 Tw T* [(Packgi)5(ng\224, )]TJ /TT3 1 Tf 0.0051 Tc 0.6606 Tw 5.367 0 Td [(2005/)6(2006/)6(2007/)6(2008 ECTC Prof)6(essi)6(onal)6( )]TJ 0.003 Tc 0 Tw -5.367 -1.173 Td (Development Course Notes)Tj /TT1 1 Tf 0.0056 Tc -0.0026 Tw 11.018 0 Td [(, 2005/)6(2006/)6(2007/)6(2008. )]TJ 0.006 Tc 0 Tw -12.446 -1.275 Td (18.)Tj /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 325.026 272.5033 Tm ( )Tj /TT1 1 Tf 0.0013 Tc 0.1162 Tw 9.6612 0 0 9.6794 326.5974 272.5033 Tm [(B. X)-5(i)2(e, X)-5(.)-2(Q)-5(.)-2( Sh)-5(i an)-5(d)-5( X)-5(.)-2(J. 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